Patent Assignment
Reel/Frame 062186/0687
Assignment of Assignor's Interest
Recorded: 2022-12-22
Pages: 4
Assignee
SHOWA DENKO K.K.
13-9, SHIBADAIMON 1-CHOME, MINATO-KU, TOKYO, 105-8518, JAPAN
Covered Property
(1)
Plasma Etching Method and Method for Manufacturing Semiconductor Element
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.