Patent Assignment
Reel/Frame 062356/0218
Assignment of Assignor's Interest
Recorded: 2023-01-12
Pages: 3
Assignor
MATSUO, MIZUKI
Executed: 2023-01-10
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method and Plasma Processing Apparatus