Patent Assignment
Reel/Frame 062645/0759
Assignment of Assignor's Interest
Recorded: 2023-02-09
Pages: 3
Assignors
KANARIK, KEREN J.
Executed: 2019-03-20
TAN, SAMANTHA SIAMHWA
Executed: 2019-03-20
PAN, YANG
Executed: 2019-03-29
MARKS, JEFFREY
Executed: 2019-03-20
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma Etching Chemistries of High Aspect Ratio Features in Dielectrics