Assignment of Assignor's Interest

Recorded: 2023-05-02 Pages: 9

Assignor

BROOKS AUTOMATION, INC.

Executed: 2021-10-01

Assignee

BROOKS AUTOMATION HOLDING, LLC

15 ELIZABETH DRIVE, CHELMSFORD, MASSACHUSETTS, 01824

Covered Property (1)

Substrate Processing Apparatus

Application: 18/161,583 →

Publication: US 2023/0245910

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.