Patent Assignment
Reel/Frame 064093/0741
Assignment of Assignor's Interest
Recorded: 2023-06-28
Pages: 5
Assignors
TANG, JIANSHE
Executed: 2021-01-06
LU, WEI
Executed: 2021-01-06
WU, HAOSHENG
Executed: 2021-03-04
SEKINE, TAKETO
Executed: 2021-02-25
CHANG, SHOU-SUNG
Executed: 2021-04-30
SOUNDARARAJAN, HARI N.
Executed: 2021-01-06
POLLARD, CHAD
Executed: 2021-01-06
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Steam-Assisted Single Substrate Cleaning Process and Apparatus