Patent Assignment
Reel/Frame 064130/0312
Assignment of Assignor's Interest
Recorded: 2023-06-30
Pages: 5
Assignor
TSANG, VINCENT W.
Executed: 2020-01-14
Assignee
BROOKS AUTOMATION INC
15 ELIZABETH DRIVE, CHELMSFORD, MASSACHUSETTS, 01824
Covered Property
(1)
Substrate Processing Apparatus
Application:
18/345,242 →
Publication:
US 2024/0001535
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.