Patent Assignment
Reel/Frame 064673/0169
Assignment of Assignor's Interest
Recorded: 2023-08-23
Pages: 6
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2021-02-19
Assignees
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD, ECONOMIC AND TECHNICAL DEVELOPMENT ZONE, BEIJING, 100176, CHINA
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Transmission-Based Temperature Measurement of a Workpiece in a Thermal Processing System
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 23, 2023
From: YANG, MICHAEL X.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 064673/0157 →
Assignment of Assignor's Interest
Aug 23, 2023
From: STOREK, MICHAEL; BREMENSDORFER, ROLF; LIEBERER, MARKUS
To: MATTSON THERMAL PRODUCTS, GMBH.
Reel/Frame 064673/0160 →
Assignment of Assignor's Interest
Aug 23, 2023
From: MATTSON THERMAL PRODUCTS, GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 064673/0165 →