Patent Assignment
Reel/Frame 064794/0202
Assignment of Assignor's Interest
Recorded: 2023-09-05
Pages: 3
Assignor
ABEL, PAUL
Executed: 2023-08-30
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method to Selectively Etch Silicon Nitride to Silicon Oxide Using Surface Alkylation