Patent Assignment
Reel/Frame 065068/0494
Assignment of Assignor's Interest
Recorded: 2023-09-28
Pages: 12
Assignors
HAN, SANGBUM
Executed: 2018-02-28
CHANG, SEOBONG
Executed: 2018-02-28
PARK, JAEEON
Executed: 2018-03-06
HENDRIX, BRYAN CLARK
Executed: 2018-03-02
BAUM, THOMAS H.
Executed: 2018-03-30
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Haloalkynyl Dicobalt Hexacarbonyl Precursors for Chemical Vapor Deposition of Cobalt