Patent Assignment
Reel/Frame 065485/0100
Assignment of Assignor's Interest
Recorded: 2023-11-07
Pages: 3
Assignors
LUO, ZHIREN
Executed: 2023-10-06
KIM, JEONG HWAN
Executed: 2023-10-23
FU, QIAN
Executed: 2023-10-06
BAGAL, ABHIJEET S.
Executed: 2023-10-09
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Halogen-Free Etching of Silicon Nitride
Application:
18/203,404 →
Publication:
US 2024/0404837