Patent Assignment
Reel/Frame 065631/0462
Assignment of Assignor's Interest
Recorded: 2023-11-21
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing System