Patent Assignment
Reel/Frame 066020/0669
Assignment of Assignor's Interest
Recorded: 2024-01-04
Pages: 3
Assignee
MKS INSTRUMENTS, INC.
2 TECH DRIVE, SUITE 201, ATTN: IP DEPARTMENT, ANDOVER, MASSACHUSETTS, 01810
Covered Property
(1)
Configuration of a Point of Use Inverted Toroidal Plasma Source
Application:
63/581,292 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.