Patent Assignment
Reel/Frame 066235/0137
Assignment of Assignor's Interest
Recorded: 2024-01-24
Pages: 9
Assignors
ZHENG, YUNAN
Executed: 2021-05-01
ZHAO, QIAN
Executed: 2021-05-03
LIANG, JIAO
Executed: 2021-11-23
FAN, YONGFA
Executed: 2022-07-18
HUANG, JIAO
Executed: 2021-05-06
FENG, MU
Executed: 2022-09-30
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Determining Metrics for a Portion of a Pattern on a Substrate