Patent Assignment
Reel/Frame 067139/0111
Assignment of Assignor's Interest
Recorded: 2024-04-17
Pages: 3
Assignor
TSUCHIYA, KAZUKI
Executed: 2024-04-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Cleaning Method