Patent Assignment
Reel/Frame 067859/0629
Assignment of Assignor's Interest
Recorded: 2024-06-27
Pages: 10
Assignors
POKIDOV, ILYA
Executed: 2021-09-17
KAMAREHI, MOHAMMAD
Executed: 2021-09-17
TRENHOLM, KENNETH B.
Executed: 2021-09-20
TEPLYUK, FEDIR VIKTOROVYCH
Executed: 2021-09-17
Assignee
MKS INSTRUMENTS, INC.
2 TECH DRIVE, SUITE 201, ANDOVER, MASSACHUSETTS, 01810
Covered Property
(1)
Method and Apparatus for Impedance Matching in a Power Delivery System for Remote Plasma Generation
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.