Patent Assignment
Reel/Frame 067990/0719
Assignment of Assignor's Interest
Recorded: 2024-07-15
Pages: 4
Assignors
HONG, TU
Executed: 2023-01-13
JI, CHUNHAI
Executed: 2023-01-13
ZHANG, PENGYI
Executed: 2023-01-13
RANA, NIRAJ
Executed: 2023-01-13
BI, FENG
Executed: 2023-01-15
LI, MING
Executed: 2023-01-15
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Undercoating Coverage and Resistance Control for Escs of Substrate Processing Systems