Patent Assignment
Reel/Frame 068086/0825
Assignment of Assignor's Interest
Recorded: 2024-07-25
Pages: 10
Assignors
PYDI, CHIRANJEEVI
Executed: 2022-04-16
RICHARD, NATHAN
Executed: 2022-05-08
DONNELL, STEVEN
Executed: 2022-04-07
MINSKY, CALEB
Executed: 2022-04-07
MUNOZ, CEREL
Executed: 2022-04-07
LIU, YAN
Executed: 2022-08-15
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Methods and Apparatus for Processing an Electrostatic Chuck
Application:
18/645,650 →
Publication:
US 2024/0286398