Patent Assignment
Reel/Frame 069687/0423
Confirmatory License
Recorded: 2024-12-13
Pages: 2
Assignor
UNIVERSITY OF NEW MEXICO
Executed: 2021-04-27
Assignee
NATIONAL SCIENCE FOUNDATION
2415 EISENHOWER AVENUE, ALEXANDRIA, VIRGINIA, 22314
Covered Property
(1)
Method and System for in-Line Optical Scatterometry