Patent Assignment
Reel/Frame 069903/0076
Assignment of Assignor's Interest
Recorded: 2025-01-16
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma Monitoring and Plasma Density Measurement in Plasma Processing Systems
Application:
18/995,541 →
Publication:
US 2026/0031311
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.