Patent Assignment
Reel/Frame 070217/0817
Assignment of Assignor's Interest
Recorded: 2025-02-14
Pages: 4
Assignee
ENTEGRIS, INC.
129 CONCORD RD., BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Coatings That Contain Fluorinated Yttrium Oxide and a Metal Oxide, and Methods of Preparing and Using the Coatings
Application:
18/751,650 →
Publication:
US 2024/0344195