Gate structure with dual width electrode layer
View Patent ↗A high-k dielectric metal gate (HKMG) transistor includes a substrate, an HKMG gate stack with a gate dielectric layer and a gate electrode layer positioned above the substrate. The gate electrode layer has an upper portion and a lower portion. A first liner contacts a sidewall portion of the upper portion. A spacer contacts the first liner and a sidewall portion of the lower portion. Raised source and drain regions are positioned adjacent the spacer. A height of the uppermost surface of the spacer is greater than a height of an uppermost surface of the raised source and drain regions. A width of the upper portion between the raised source and drain regions is smaller than a width of the lower portion between the raised source and drain regions.
1. A high-k dielectric metal gate (HKMG) transistor, comprising:
a substrate;
an HKMG gate stack with a gate dielectric layer and a gate electrode layer positioned above said substrate, wherein said gate electrode layer has an upper portion and a lower portion;
a first liner contacting a sidewall portion of said upper portion;
a spacer contacting said first liner and a sidewall portion of said lower portion; and
raised source and drain regions adjacent said spacer, wherein a height of an uppermost surface of said spacer is greater than a height of an uppermost surface of said raised source and drain regions, and a width of said upper portion between said raised source and drain regions is smaller than a width of said lower portion between said raised source and drain regions.
2. The transistor of claim 1 , wherein said upper portion has four sides and said liner contacts each of said four sides.
3. The transistor of claim 1 , wherein said upper portion has four sides and said liner contacts only two of said four sides.
4. The transistor of claim 1 , wherein said liner comprises a nitride layer or a low-k dielectric layer.
5. The transistor of claim 1 , wherein said liner has a lateral thickness between 2 nm and 10 nm.
6. The transistor of claim 1 , wherein both said width of said upper portion and said width of said lower portion between said raised source and drain regions are substantially constant across a thickness of said upper and the lower portion, respectively.
7. The transistor of claim 1 , wherein a first thickness of said upper portion is substantially equal to a second thickness of said lower portion.
8. The transistor of claim 1 , wherein said substrate is a fully-depleted silicon-on-insulator substrate.
9. A high-k dielectric metal gate (HKMG) transistor, comprising:
a substrate;
an HKMG gate stack with a gate dielectric layer and a gate electrode layer positioned above said substrate, wherein said gate electrode layer has an upper portion and a lower portion, said upper portion has four sides, and a first thickness of said upper portion is substantially equal to a second thickness of said lower portion;
a first liner contacting a sidewall portion of said upper portion on each of said four sides;
a spacer contacting said first liner and a sidewall portion of said lower portion; and
raised source and drain regions adjacent said spacer, wherein a height of an uppermost surface of said spacer is greater than a height of an uppermost surface of said raised source and drain regions, and a width of said upper portion between said raised source and drain regions is smaller than a width of said lower portion between said raised source and drain regions.
10. The transistor of claim 9 , wherein said upper portion has four sides and said liner contacts each of said four sides.
11. The transistor of claim 9 , wherein said liner comprises a nitride layer or a low-k dielectric layer.
12. The transistor of claim 9 , wherein said liner has a lateral thickness between 2 nm and 10 nm.
13. The transistor of claim 9 , wherein both said width of said upper portion and said width of said lower portion between said raised source and drain regions are substantially constant across said thickness of said upper and the lower portion, respectively.
14. The transistor of claim 9 , wherein said substrate is a fully-depleted silicon-on-insulator substrate.