Interconnect structure
View Patent ↗The present disclosure relates to semiconductor structures and, more particularly, to an interconnect structure to connect between different package configurations and methods of manufacture. The structure includes an interconnect comprising a plurality of conductive levels and columns configured into a grid pattern within an insulator material, the plurality of conductive levels and columns aligned to connect to different package configurations; and a control circuit that provides a signal to the interconnect to connect to a combination of the different package configurations.
1. A structure, comprising:
an interconnect comprising a plurality of conductive levels and columns configured into a grid pattern within an insulator material, the plurality of conductive levels and columns aligned to connect to different package configurations with different connection technologies; and
a control circuit which includes programmable fuses associated with the different package configurations with the different connection technologies and which is configured to provide a control signal to the interconnect to connect the interconnect to any combination of the different package configurations with the different connection technologies.
2. The structure of claim 1 , wherein the different package configurations include 2D, 2.5D and 3D configurations.
3. The structure of claim 1 , wherein the different connection technologies include a micropillar connection and a through silicon via (TSV) connection.
4. The structure of claim 1 , wherein the control circuit is connected to any level of the interconnect.
5. The structure of claim 4 , wherein the interconnect is isolated from back end of the line wirings.
6. The structure of claim 3 , further comprising a dummy pad located between the micropillar and the interconnect to force an I/O connection to a different package configuration.
7. The structure of claim 1 , wherein the conductive levels and columns comprises a conductive material composed of one of aluminum, copper and tungsten.
8. The structure of claim 1 , wherein the interconnect is a back end of the line structure.
9. An interconnect structure comprising:
a back end of the line interconnect comprising a conductive grid pattern comprising a plurality of columns configured to connect to different package configurations with different connection technologies; and
a control circuit with programmable fuses associated with the different package configurations with the different connection technologies and which, upon being blown, connect the back end of the line interconnect to any combination of the different package configurations with the different connection technologies.
10. The interconnect structure of claim 9 , wherein the different package configurations include 2D, 2.5D and 3D configurations which use different connection technologies.
11. The interconnect structure of claim 10 , wherein the different connection technologies include at least one of a micropillar connection and a through silicon via (TSV) connection.
12. The interconnect structure of claim 11 , wherein the control circuit is connected to any level of the back end of the line interconnect.
13. The interconnect structure of claim 11 , wherein the back end of the line interconnect is isolated from back end of the line wirings.
14. The interconnect structure of claim 9 , further comprising a dummy pad located between a micropillar of one the different package configurations and the back end of the line interconnect to force an I/O connection to a different package configuration.
15. The interconnect structure of claim 9 , wherein the different package configurations include at least a single-chip module (SCM) and a multi-chip module (MCM).
16. A process comprising:
fabricating a control circuit and interconnect structure comprising a conductive grid pattern comprising a plurality of columns configured to connect to different package configurations with different connection technologies;
determining which type(s) of package configuration will be used in a module assembly; and
blowing an appropriate fuse(s) of the control circuit for an intended package type used in the module assembly such that the interconnect structure makes an electrical connection to the intended package type.
17. The process of claim 16 , further comprising testing the module assembly.
18. The process of claim 16 , wherein the intended package type is at least one of a 3D, single-chip module (SCM), multi-chip module (MCM), 2.5D and 2D package type.
19. The interconnect structure of claim 1 , wherein the control circuit includes a plurality of programmable fuses each of which are related to connections for the different connection technologies and further comprising a dummy pad that electrically isolates the different package configurations from the interconnect.
20. The interconnect structure of claim 9 , wherein the control circuit includes a plurality of programmable fuses each of which are related to connections for the different connection technologies and further comprising a dummy pad that electrically isolates the different package configurations from the interconnect.