Thin film transistor, thin film transistor substrate, and liquid crystal display device
View Patent ↗It is an object of the present invention to provide a technique capable of reducing a contact resistance between source and drain electrodes and a channel region. A thin film transistor includes: a first semiconductor layer provided on a first insulation film lying on a gate electrode and adjacent to a partial region that is part of the first insulation film lying on the gate electrode as seen in plan view; a source electrode and a drain electrode sandwiching the partial region therebetween as seen in plan view; a second insulation film having an opening portion provided over the partial region; and a second semiconductor layer provided on the second insulation film. The second semiconductor layer is in contact with the source electrode and the drain electrode, and is in contact with the partial region and the first semiconductor layer through the opening portion of the second insulation film.
1. A thin film transistor comprising:
a gate electrode provided on a substrate;
a first insulation film for covering the gate electrode;
a first semiconductor layer provided on the first insulation film lying on the gate electrode and adjacent to a partial region that is part of the first insulation film lying on the gate electrode as seen in plan view;
a source electrode and a drain electrode sandwiching the partial region between the source electrode and the drain electrode as seen in plan view, at least one of the source and drain electrodes being provided on the first insulation film and the first semiconductor layer;
a second insulation film provided on the source electrode and the drain electrode except part of the source electrode and part of the drain electrode and having an opening portion provided over the partial region; and
a second semiconductor layer provided on the second insulation film, the second semiconductor layer being in contact with the part of the source electrode and the part of the drain electrode, the second semiconductor layer being in contact with the partial region and the first semiconductor layer through the opening portion.
2. The thin film transistor according to claim 1 , wherein
the first semiconductor layer and the second semiconductor layer include an oxide semiconductor.
3. The thin film transistor according to claim 2 , wherein
the first semiconductor layer has a carrier density higher than that of the second semiconductor layer.
4. The thin film transistor according to claim 2 , further comprising a third insulation film provided on the second semiconductor layer.
5. The thin film transistor according to claim 2 , wherein
the first semiconductor layer is provided so as to protrude from the source electrode toward the partial region as seen in plan view when the first semiconductor layer is provided under the source electrode; and
wherein the first semiconductor layer is provided so as to protrude from the drain electrode toward the partial region as seen in plan view when the first semiconductor layer is provided under the drain electrode.
6. A thin film transistor substrate comprising:
a thin film transistor as recited in claim 2 ;
the substrate;
a gate interconnect line and a source interconnect line intersecting each other on the substrate and connected to the thin film transistor;
a pixel electrode including a third semiconductor layer and provided in a region defined by the gate interconnect line and the source interconnect line, the pixel electrode being in contact with the drain electrode; and
a counter electrode including a fourth semiconductor layer and provided over the pixel electrode while being insulated from the pixel electrode,
wherein the third semiconductor layer of the pixel electrode serves as the same layer as the first semiconductor layer, and
wherein the fourth semiconductor layer of the counter electrode serves as the same layer as the second semiconductor layer.
7. The thin film transistor substrate according to claim 6 , further comprising
a semiconductor layer serving as the same layer as the third semiconductor layer and provided under the source interconnect line.
8. The thin film transistor substrate according to claim 6 , wherein
the counter electrode has a plurality of slit opening portions or a comb tooth shape.
9. A liquid crystal display device comprising:
a thin film transistor substrate according to claim 6 ; and
a counter substrate holding a liquid crystal layer between the thin film transistor substrate and the counter substrate.
10. The liquid crystal display device according to claim 9 , further comprising
a driving circuit provided on the thin film transistor substrate and including another thin film transistor similar to the thin film transistor.
11. The thin film transistor according to claim 1 , wherein
the first semiconductor layer has a carrier density higher than that of the second semiconductor layer.
12. The thin film transistor according to claim 1 , further comprising
a third insulation film provided on the second semiconductor layer.
13. The thin film transistor according to claim 1 ,
wherein the first semiconductor layer is provided so as to protrude from the source electrode toward the partial region as seen in plan view when the first semiconductor layer is provided under the source electrode; and
wherein the first semiconductor layer is provided so as to protrude from the drain electrode toward the partial region as seen in plan view when the first semiconductor layer is provided under the drain electrode.
14. A thin film transistor substrate comprising:
a thin film transistor as recited in claim 1 ;
the substrate;
a gate interconnect line and a source interconnect line intersecting each other on the substrate and connected to the thin film transistor;
a pixel electrode including a third semiconductor layer and provided in a region defined by the gate interconnect line and the source interconnect line, the pixel electrode being in contact with the drain electrode; and
a counter electrode including a fourth semiconductor layer and provided over the pixel electrode while being insulated from the pixel electrode,
wherein the third semiconductor layer of the pixel electrode serves as the same layer as the first semiconductor layer, and
wherein the fourth semiconductor layer of the counter electrode serves as the same layer as the second semiconductor layer.
15. The thin film transistor substrate according to claim 14 , further comprising
a semiconductor layer serving as the same layer as the third semiconductor layer and provided under the source interconnect line.
16. The thin film transistor substrate according to claim 14 , wherein
the counter electrode has a plurality of slit opening portions or a comb tooth shape.
17. A liquid crystal display device comprising:
a thin transistor substrate according to claim 14 ; and
a counter substrate holding a liquid crystal layer between the thin film transistor substrate and the counter substrate.
18. The liquid crystal display device according to claim 17 , further comprising
a driving circuit provided on the thin film transistor substrate and including another thin film transistor similar to the thin film transistor.