Image sensor chip scale packages and related methods
Methods of forming an image sensor chip scale package. Implementations may include providing a semiconductor wafer having a pixel array, forming a first cavity through the wafer and/or one or more layers coupled over the wafer, filling the first cavity with a fill material, planarizing the fill material and/or the one or more layers to form a first surface of the fill material coplanar with a first surface of the one or more layers, and bonding a transparent cover over the fill material and the one or more layers. The bond may be a fusion bond between the transparent cover and a passivation oxide; a fusion bond between the transparent cover and an anti-reflective coating; a bond between the transparent cover and an organic adhesive coupled over the fill material, and/or; a bond between a first metallized surface of the transparent cover and a metallized layer coupled over the wafer.
1. An image sensor chip scale package (CSP) comprising:
a die comprising one or more layers thereon, an array of pixels, and an array of microlenses;
a cavity through one of the die or the one or more layers, the cavity comprising a fill material; and
an optically transmissive cover bonded over the fill material and over the one or more layers using one of a fusion bond between the optically transmissive cover and a passivation oxide or a fusion bond between the optically transmissive cover and anti-reflective coating;
wherein the cavity is configured to comprise an entire width of a conductive pad.
2. The image sensor CSP of claim 1 , wherein the fill material comprises an oxide.
3. The image sensor CSP of claim 1 , wherein the optically transmissive cover comprises one of a second cavity or a lens.
4. The image sensor CSP of claim 1 , further comprising a plurality of stacked die.
5. The image sensor CSP of claim 1 , further comprising a second cavity comprised through one of the die or the one or more layers and the second cavity is filled with one of the fill material or a second fill material.
6. The image sensor CSP of claim 1 , wherein a first surface of the fill material is coplanar with a plane that intersects a color filter array (CFA) of the image sensor CSP.
7. An image sensor chip scale package (CSP) comprising:
a die comprising an array of pixels and an array of microlenses coupled thereto;
a first cavity through one of the die and one or more layers coupled over the die; the first cavity comprising a fill material;
an optically transmissive cover bonded over the fill material and over the one or more layers; and
one or more openings comprised in a layer defining the first cavity to test one or more electrical functions of the image sensor CSP.
8. The image sensor CSP of claim 7 , further comprising a second cavity comprised through one of the die or the one or more layers, the second cavity filled with one of the fill material or a second fill material.
9. The image sensor CSP of claim 7 , wherein the optically transmissive cover comprises one of a second cavity or a lens.
10. A method of forming an image sensor chip scale package (CSP) comprising:
forming a cavity through one of a wafer or one or more layers comprised in the wafer;
forming a conductive pad in the cavity, wherein an entire width of the conductive pad is formed within the cavity;
applying a fill material over the conductive pad and in the cavity;
bonding an optically transmissive cover over the fill material, over the one or more layers, and over an array of microlenses coupled to the one or more layers; and
singulating the wafer into a plurality of image sensor chip scale packages;
wherein the cavity comprises at least a portion of a testing contact, the testing contact configured to test one or more electrical functions of the image sensor CSP.
11. The method of claim 10 , further comprising planarizing the fill material to form a surface coplanar with a first surface of the one or more layers.
12. The method of claim 10 , further comprising forming a second cavity through one of the wafer and the one or more layers, the second cavity filled with one of the fill material or a second fill material.
13. The method of claim 12 , further comprising planarizing one of the fill material or the second fill material to form a second surface coplanar with a first surface of the fill material.
14. The method of claim 10 , wherein the cavity is a first cavity and the optically transmissive cover is bonded over a full diameter of the first cavity and over at least a portion of a diameter of a second cavity.
15. The method of claim 10 , wherein the optically transmissive cover comprises one of a cavity or a global lens.