Optical interference range sensor

1. An optical interference ranging sensor comprising:

a light source configured to project a light beam while continuously varying a wavelength thereof;

an interferometer comprising a splitting unit including a coupler configured to split the light beam projected from the light source into light beams radiated toward a plurality of spots on a measurement target, the interferometer being configured to generate interference beams with the light beams split in correspondence with the plurality of spots, each of the interference beams being generated by interference between a measurement beam radiated toward the measurement target and reflected at the measurement target and a reference beam passing through an optical path that is at least partially different from an optical path of the measurement beam;

a light-receiving unit comprising a photodetector configured to receive the interference beams from the interferometer; and

a processor configured to perform operations comprising detecting a peak of the received interference beams, and calculating a distance to the measurement target by associating the detected peak with one of the plurality of spots in accordance with a mirror surface mode or a rough surface mode, which are modes for measuring the measurement target, wherein

an optical path length difference between the measurement beam and the reference beam is made different among the light beams split in correspondence with the plurality of spots, and

in the mirror surface mode, the processor uses, as a result of measuring the distance to the measurement target, a distance calculated based on a peak corresponding to a spot for which the optical path length difference is shortest, out of a plurality of the detected peaks.

2. The optical interference ranging sensor according to claim 1 ,

wherein in the rough surface mode, the processor uses a distance calculated based on the plurality of detected peaks as the result of measuring the distance.

3. The optical interference ranging sensor according to claim 2 ,

wherein the interferometer has one objective lens, and

the measurement beam of each of the light beams split in correspondence with the plurality of spots by the splitting unit is radiated toward the measurement target via the one objective lens.

4. The optical interference ranging sensor according to claim 2 ,

wherein the interferometer generates each of the interference beams by interference between a first reflected beam that is a reflected beam of the measurement beam radiated toward the measurement target and reflected at the measurement target and a second reflected beam that is a reflected beam of the reference beam reflected at a reference surface.

5. The optical interference ranging sensor according to claim 2 ,

wherein a difference ΔL in the optical path length difference among the light beams split in correspondence with the plurality of spots is at least larger than a distance resolution δL FWHM , which is represented by:

δ L FWHM =c/nδf

(where c: speed of light, n: refractive index in optical path difference, δf: frequency sweep width).

6. The optical interference ranging sensor according to claim 2 ,

wherein one of the mirror surface mode and the rough surface mode is selectable by a user.

7. The optical interference ranging sensor according to claim 1 ,

wherein the interferometer has one objective lens, and

the measurement beam of each of the light beams split in correspondence with the plurality of spots by the splitting unit is radiated toward the measurement target via the one objective lens.

8. The optical interference ranging sensor according to claim 7 ,

wherein a spot for which the optical path length difference is shortest, out of the optical path length differences corresponding to the respective spots, is arranged on an optical axis of the one objective lens.

9. The optical interference ranging sensor according to claim 8 ,

wherein the interferometer generates each of the interference beams by interference between a first reflected beam that is a reflected beam of the measurement beam radiated toward the measurement target and reflected at the measurement target and a second reflected beam that is a reflected beam of the reference beam reflected at a reference surface.

10. The optical interference ranging sensor according to claim 8 ,

wherein a difference ΔL in the optical path length difference among the light beams split in correspondence with the plurality of spots is at least larger than a distance resolution δL FWHM , which is represented by:

δ L FWHM =c/nδf

(where c: speed of light, n: refractive index in optical path difference, δf: frequency sweep width).

11. The optical interference ranging sensor according to claim 7 ,

wherein the interferometer generates each of the interference beams by interference between a first reflected beam that is a reflected beam of the measurement beam radiated toward the measurement target and reflected at the measurement target and a second reflected beam that is a reflected beam of the reference beam reflected at a reference surface.

12. The optical interference ranging sensor according to claim 7 ,

wherein a difference ΔL in the optical path length difference among the light beams split in correspondence with the plurality of spots is at least larger than a distance resolution δL FWHM , which is represented by:

δ L FWHM =c/nδf

(where c: speed of light, n: refractive index in optical path difference, δf: frequency sweep width).

13. The optical interference ranging sensor according to claim 7 ,

wherein one of the mirror surface mode and the rough surface mode is selectable by a user.

14. The optical interference ranging sensor according to claim 1 ,

wherein the interferometer generates each of the interference beams by interference between a first reflected beam that is a reflected beam of the measurement beam radiated toward the measurement target and reflected at the measurement target and a second reflected beam that is a reflected beam of the reference beam reflected at a reference surface.

15. The optical interference ranging sensor according to claim 14 ,

wherein positions of leading ends of optical fiber cables for transmitting the respective light beams split in correspondence with the plurality of spots are shifted with respect to each other in an optical axis direction, each of the leading ends serving as the reference surface.

16. The optical interference ranging sensor according to claim 14 ,

wherein a difference ΔL in the optical path length difference among the light beams split in correspondence with the plurality of spots is at least larger than a distance resolution δL FWHM , which is represented by:

δ L FWHM =c/nδf

(where c: speed of light, n: refractive index in optical path difference, δf: frequency sweep width).

17. The optical interference ranging sensor according to claim 15 ,

wherein a difference ΔL in the optical path length difference among the light beams split in correspondence with the plurality of spots is at least larger than a distance resolution δL FWHM , which is represented by:

δ L FWHM =c/nδf

(where c: speed of light, n: refractive index in optical path difference, δf: frequency sweep width).

18. The optical interference ranging sensor according to claim 1 ,

wherein a difference ΔL in the optical path length difference among the light beams split in correspondence with the plurality of spots is at least larger than a distance resolution δL FWHM , which is represented by:

δ L FWHM =c/nδf

(where c: speed of light, n: refractive index in optical path difference, δf: frequency sweep width).

19. The optical interference ranging sensor according to claim 1 ,

wherein one of the mirror surface mode and the rough surface mode is selectable by a user.

20. The optical interference ranging sensor according to claim 1 ,

wherein the processor applies the mirror surface mode if the number of detected peaks of the received interference beams is larger than the number of the plurality of spots.