Intraocular pressure sensor
A pressure sensor system is provided. In another aspect, a wireless intraocular pressure sensor includes a deformable or stretchable inductor. A further aspect of an intraocular pressure sensing system includes a deformable inductor sized to contact an eye. Another aspect provides an organ pressure sensing system including a passive inductor with a wavy, serpentine or undulating shape.
1 . A method of making a pressure sensor, the method comprising:
(a) depositing a polymeric bottom layer;
(b) depositing a first metallic layer on the polymeric bottom layer;
(c) depositing a middle polymeric layer on the first metallic layer;
(d) depositing a second metallic layer on the intermediate polymeric layer such that the first and second metallic layers overlap with the middle polymeric layer therebetween;
(e) depositing a polymeric upper layer on the upper metallic layer;
(f) the polymeric layers encapsulating a majority of the metallic layers therein;
(g) creating an undulating shape to at least one of the metallic layers which is an inductor, the undulating shaped inductor being stretchably expandable to operably change a readout signal of the pressure sensor; and
(d) the metallic layers being configured to sense inductance and transmit a signal outside of the sensor, with the overlapping metallic layers being a capacitor.
2 . The method of claim 1 , further comprising creating a wireless, intraocular pressure sensor from the layers, the undulating shaped inductor being configured to surround and be external to a cornea of an eye without in vivo implantation and without obstructing vision of the eye.
3 . The method of claim 2 , further comprising creating a central opening in the layers with polymeric material located between the metallic layers and the central opening of the sensor, and with polymeric material located between the metallic layers and a peripheral edge of the sensor.
4 . The method of claim 3 , wherein a multifunctional inductor and antenna is a single loop of the metallic layers with the overlapping first and second metallic layers creating end segments of the single loop.
5 . The method of claim 2 , further comprising sensing intraocular pressure and transmitting an output from the undulating shaped which is a single looped flexible inductor, of the metallic layers, to a remote reader, without a microprocessor or battery mounted to the sensor.
6 . The method of claim 1 , wherein the depositing of the metallic layers includes printing metallic material.
7 . The method of claim 1 , wherein the depositing of the metallic layers includes at least one of: vapor depositing, sputtering, electroplating, or electroless plating.
8 . The method of claim 1 , wherein the depositing of at least one of the metallic layers includes patterning the undulating shape using photolithography and then wet-etching.
9 . The method of claim 1 , further comprising creating the pressure sensor to be 500-900 nm for one of the metallic layers, 3-10 μm for the polymeric bottom layer, and 3-10 μm for the polymeric upper layer.
10 . A method of making a pressure sensor, the method comprising:
(a) depositing a polymeric bottom layer;
(b) depositing a first metallic layer on the polymeric bottom layer;
(c) depositing a middle polymeric layer on the first metallic layer;
(d) depositing a second metallic layer on the intermediate polymeric layer such that the first and second metallic layers overlap with the middle polymeric layer therebetween;
(e) depositing a polymeric upper layer on the upper metallic layer;
(f) creating an undulating shape to at least one of the metallic layers;
(g) causing the pressure sensor to be configured to sense inductance due to intraocular pressure and transmit a wireless signal outside of the sensor; and
(h) the at least one of the metallic layers with the undulating shape being configured to surround and be external to a cornea of an eye without in vivo implantation and without obstructing vision of the eye.
11 . The method of claim 10 , wherein:
the polymeric layers encapsulate a majority of the metallic layers therein;
the overlapping metallic layers are configured to act as a capacitor;
the pressure sensor is without a microprocessor or battery thereon; and
the at least one of the metallic layers with the undulating shape being an expandable inductor after the encapsulation thereof.
12 . A method of making a pressure sensor, the method comprising:
(a) depositing a polymeric bottom layer;
(b) depositing a first metallic layer on the polymeric bottom layer;
(c) depositing a middle polymeric layer on the first metallic layer;
(d) depositing a second metallic layer on the intermediate polymeric layer such that the first and second metallic layers overlap with the middle polymeric layer therebetween;
(e) depositing a polymeric upper layer on the upper metallic layer;
(f) creating an undulating shape to at least one of the metallic layers;
(g) creating a circular peripheral edge of the polymeric layers, and inwardly spacing peaks and valleys of the undulating shaped of the metallic layers away from the peripheral edge;
(h) creating a multifunctional inductor and antenna from a single loop of the metallic layers, with the overlapping first and second metallic layers creating end segments of the single loop; and
(i) causing the pressure sensor to be configured to sense inductance due to intraocular pressure and transmit a wireless signal outside of the sensor.
13 . The method of claim 10 , wherein the depositing of the metallic layers includes printing metallic material.
14 . The method of claim 10 , wherein the depositing of the metallic layers includes at least one of: vapor depositing, sputtering, electroplating, or electroless plating.
15 . The method of claim 10 , wherein the depositing of at least one of the metallic layers includes patterning the undulating shape using photolithography and then wet-etching.
16 . The method of claim 10 , wherein the at least one of the metallic layers which has an undulating shape is made as a single loop.
17 . The method of claim 10 , further comprising molding the upper and bottom polymeric layers into a shape matching an adjacent external portion of an eye.
18 . The method of claim 10 , further comprising using a photoresistant mask to protect the at least one of the metallic layers which has an undulating shape, during subsequent plasma dry etching.
19 . The method of claim 1 , wherein the at least one of the metallic layers which has an undulating shape is made as a single loop radially spaced inward from a circular periphery of the encapsulating bottom and upper polymer layers.
20 . The method of claim 1 , further comprising molding the upper and bottom polymeric layers into a shape matching an adjacent external portion of an eye.
21 . The method of claim 1 , further comprising using a photoresistant mask to protect the at least one of the metallic layers which has an undulating shape, during subsequent plasma dry etching.
22 . The method of claim 12 , wherein the at least one of the metallic layers which has an undulating shape is made as a single loop.