Ultrasonic sensor
An ultrasonic sensor is a sensor that transmits an ultrasonic wave to a target object and receives the ultrasonic wave reflected by the target object, the ultrasonic sensor including an ultrasonic array chip on which ultrasonic elements that transmit and receive the ultrasonic wave are arranged in an array shape. Each of the ultrasonic elements includes a vibrating section and a piezoelectric element provided in the vibrating section, vibrates the vibrating section to transmit the ultrasonic wave, and outputs a reception signal of the ultrasonic wave by the vibration of the vibrating section. A resonance frequency of the ultrasonic element is 2000 kHz or less.
1 . An ultrasonic sensor that transmits an ultrasonic wave to a target object and receives the ultrasonic wave reflected by the target object, the ultrasonic sensor comprising:
an ultrasonic array chip on which ultrasonic elements that transmit and receive the ultrasonic wave are arranged in an array shape, wherein
each of the ultrasonic elements includes a vibrating section and a piezoelectric element provided in the vibrating section, vibrates the vibrating section to transmit the ultrasonic wave, and outputs a reception signal of the ultrasonic wave by the vibration of the vibrating section, and
each of the ultrasonic elements is configured to selectably have one of the following properties:
a first property in which:
a resonance frequency is 600 kHz or more and less than 1000 kHz;
a reverberation time is 60 us or less;
a distance between the ultrasonic sensor and the target object is 10 mm; and
a spot diameter of an ultrasonic beam is 10 mm or less;
a second property in which:
the resonance frequency is 1000 kHz or more and less than 1500 KHz;
the reverberation time is 50 us or less;
the distance between the ultrasonic sensor and the target object is in a range of 5 mm to 10 mm; and
the spot diameter of the ultrasonic beam is 10 mm or less; and
a third property in which:
the resonance frequency is in a range of 1500 kHz to 2000 kHz;
the reverberation time is 25 us or less;
the distance between the ultrasonic sensor and the target object is 5 mm or less; and
the spot diameter of the ultrasonic beam is 10 mm or less.
2 . The ultrasonic sensor according to claim 1 , wherein, when viewed from a transmission direction of the ultrasonic wave, the ultrasonic array chip has a rectangular shape, and a length of one side of the ultrasonic array chip is 5 mm or less.
3 . The ultrasonic sensor according to claim 1 , wherein
the reverberation time is a time until a vibration amplitude of the vibrating section caused by transmitting the ultrasonic wave from the ultrasonic element decreases to 10% or less of the vibration amplitude of the vibrating section immediately after the transmission of the ultrasonic wave.
4 . The ultrasonic sensor according to claim 2 , wherein
the reverberation time is a time until a vibration amplitude of the vibrating section caused by transmitting the ultrasonic wave from the ultrasonic element decreases to 10% or less of the vibration amplitude of the vibrating section immediately after the transmission of the ultrasonic wave.