Substrate processing module and substrate processing device provided with same
A substrate processing module of a substrate processing device includes a first tank and a second tank and that are arranged in a first direction and in which a substrate can be disposed, and two first transport units and that transport the substrate. One first transport unit includes a second chuck that is movable up and down and is disposed in the second tank in a state of holding the substrate, and the other first transport unit includes a first chuck that is movable up and down and is disposed in the first tank in a state of holding the substrate. At least one of the second chuck and the first chuck is movable between a position above the second tank and a position above the first tank. The second chuck and the first chuck are configured to be able to transfer the substrate therebetween.
1 . A substrate processing module comprising:
a first tank and a second tank that are arranged in a first direction and in which a substrate can be disposed;
two first transport units that transport the substrate in the first direction; and
a second transport unit that transports the substrate in a second direction,
wherein one of the first transport units includes a first chuck that is movable up and down and is disposed in the first tank in a state of holding a substrate,
another of the first transport units includes a second chuck that is movable up and down and is disposed in the second tank in a state of holding a substrate,
at least one of the first chuck and the second chuck is movable in the first direction between a position above the first tank and a position above the second tank,
the second direction intersects the first direction and the up and down direction, and
the first chuck and the second chuck are configured to be able to transfer a substrate between the first chuck and the second chuck.
2 . The substrate processing module according to claim 1 , wherein
the first chuck has projections on which the substrate is placed,
the second chuck has projections on which the substrate is placed, and
the first chuck and the second chuck can pass through each other in an elevating direction.
3 . The substrate processing module according to claim 1 , wherein
the first tank is a cleaning tank, and
the second tank is a chemical liquid tank.
4 . The substrate processing module according to claim 1 , wherein the second chuck is movable between the position above the first tank and the position above the second tank.
5 . The substrate processing module according to claim 1 , wherein the first chuck receives the substrate held by the second chuck at the position above the first tank.
6 . The substrate processing module according to claim 1 , wherein the second transport unit supplies the substrate to the second chuck and collects the substrate held by the first chuck.
7 . The substrate processing module according to claim 6 , wherein the second transport unit supplies the substrate to the second chuck and collects the substrate supported by the first chuck at the position above the first tank.
8 . A substrate processing device comprising: the substrate processing module according to claim 1 ; and another module connected to the substrate processing module in the second direction intersecting the first direction and the up and down direction.