Resin sealing apparatus and sealing mold
In a sealing mold, one of an upper mold and a lower mold is provided with one workpiece holding part that holds workpieces, and the other of the upper mold and the lower mold is provided with: clampers having structures divided from each other that individually clamp the workpieces held on the one workpiece holding part; and a cavity piece capable of moving up and down in a manner unlinked with the clamper at a central position in a plan view of each of the clampers. The sealing mold includes: a clamper spring that biases the clamper toward the workpiece holding part; and a cavity piece spring that biases the cavity piece toward the workpiece holding part.
1 . A sealing mold that seals a workpiece, in which an electronic component is mounted on a substrate, with a resin to process into a molded product, the sealing mold comprising:
a first mold, comprising a workpiece holding part that holds the workpiece; and
a second mold, comprising:
a plurality of clampers having structures divided from each other that individually clamp the workpiece held on the workpiece holding part;
a cavity piece capable of moving up and down in a manner unlinked with a respective one of the plurality of clampers at a central position in a plan view of the respective one of the plurality of clampers;
a clamper spring that biases the respective one of the plurality of clampers toward the workpiece holding part;
a cavity piece spring that biases the cavity piece toward the workpiece holding part; and
a cavity block provided with: an internal space accommodating the respective one of the plurality of clampers, the cavity piece, and the clamper spring; and a spacing part spacing a clamper support part for each electronic component.
2 . The sealing mold according to claim 1 , wherein
the plurality of clampers are configured to be arranged in parallel in a predetermined direction, or are configured to be arranged in a matrix in a horizontal plane.
3 . The sealing mold according to claim 1 , wherein
in a plan view, the clamper spring is composed of one spring arranged to be aligned with a center of the cavity piece spring, or is composed of a plurality of springs arranged to surround the cavity piece spring.
4 . The sealing mold according to claim 1 , wherein the second mold further comprises
a movable pin that penetrates the cavity block to communicate with the internal space, and
a biasing force of the cavity piece spring is transmitted to the cavity piece via the movable pin.
5 . The sealing mold according to claim 1 , wherein
a workpiece clamping force during resin sealing is set by the clamper spring, and
a molding pressure during resin sealing is set by the cavity piece spring.
6 . The sealing mold according to claim 5 , wherein
the clamper spring is selected from a plurality of types of springs with spring constants different from each other according to resin sealing conditions, and then is detachably fixed to the second mold.
7 . The sealing mold according to claim 5 , wherein
the cavity piece spring is selected from a plurality of types of springs with spring constants different from each other according to resin sealing conditions, and then is detachably fixed to the second mold.
8 . The sealing mold according to claim 1 , wherein the second mold further comprises a plate that is connected to the cavity block and accommodates the cavity piece spring.
9 . A resin sealing apparatus comprising the sealing mold according to claim 1 .