Robot control device, robot, and method of controlling the robot
A robot control device configured to control operation of a robot configured to transfer a substrate while holding the substrate is provided. The substrate becomes in a first state where an end effector holds the substrate and the substrate is not placed at an installation position, when the end effector positions at a first teaching point above the installation position. The substrate becomes in a second state where the end effector does not hold the substrate and the substrate is placed at the installation position, when the end effector positions at a second teaching point below the installation position. The first and second states can be switched by causing the robot to perform a first operation to move the end effector from either one of the first teaching point and the second teaching point to the other one of the first teaching point and the second teaching point.
1 . A robot control device, comprising:
a processor; and
a memory storing instructions executable by the processor to control a robot,
wherein the robot includes:
a robotic arm having at least one joint axis; and
an end effector provided to a tip end of the robotic arm and configured to hold a substrate, wherein
the substrate is in a first state where the end effector holds the substrate and the substrate is not placed at an installation position, when the end effector is positioned at a first teaching point above the installation position,
the substrate is in a second state where the end effector does not hold the substrate and the substrate is placed at the installation position, when the end effector is positioned at a second teaching point below the installation position, and
the instructions cause the processor to:
control the robot to switch between the first state and the second state by performing an operation moving the end effector from either one of the first teaching point and the second teaching point to the other one of the first teaching point and the second teaching point; and
control the robot to perform the operation without stopping the end effector.
2 . The robot control device of claim 1 , wherein the instructions cause the processor to control the robot to perform the operation without decelerating the end effector at or near the installation position.
3 . The robot control device of claim 1 , wherein
positional information on the installation position is stored in the memory, and
the instructions cause the processor to derive at least either one of the first teaching point and the second teaching point based on a distance from the installation position.
4 . A robot, comprising:
the robot control device of claim 1 ;
the robotic arm; and
the end effector.
5 . The robot of claim 4 , wherein
the end effector includes a base-end part connected to a tip end of the robotic arm, and two tip-end parts branching from the base-end part so as to extend to a tip-end side, and
the first teaching point and the second teaching point are set such that the installation position passes through between the two tip-end parts when the end effector passes the installation position during the first operation.
6 . A robot control method for controlling operation of a robot including a robotic arm having at least one joint axis, and an end effector provided to a tip end of the robotic arm and configured to hold a substrate, wherein the substrate is in a first state where the end effector holds the substrate and the substrate is not placed at an installation position, when the end effector is positioned at a first teaching point above the installation position, and wherein the substrate is in a second state where the end effector does not hold the substrate and the substrate is placed at the installation position, when the end effector is positioned at a second teaching point below the installation position, the robot control method comprising:
controlling the robot to position the end effector at either one of the first teaching point and the second teaching point;
controlling the robot to switch between the first state and the second state by performing a operation moving the end effector from the one of the first teaching point and the second teaching point to the other one of the first teaching point and the second teaching point; and
controlling the robot to perform the operation without stopping the end effector.
7 . The robot control device of claim 1 , wherein the robot is a horizontal articulated robot.
8 . The robot control device of claim 1 , wherein the installation position is provided at a tip end of a plate member longitudinally extending in a horizontal plane.
9 . The robot control device of claim 8 , wherein the plate member is formed in an I-shape having a uniform dimension in a width direction.
10 . The robot control device of claim 1 , wherein the instructions cause the processor to derive the first teaching point based on a first distance from the installation position, and derive the second teaching point based on a second distance from the installation position.
11 . The robot control device of claim 10 , wherein the first distance and the second distance are equal to each other.
12 . The robot control device of claim 1 , wherein the instructions cause the processor to control the robot such that the end effector passes the installation position at a maximum speed during the operation.
13 . The robot control device of claim 1 , wherein the robot further comprises a pedestal, an elevating shaft provided to the pedestal, and the robotic arm provided to an upper end of the elevating shaft.
14 . The robot control device of claim 13 , wherein the robotic arm includes a first link attached to the elevating shaft and a second link attached to the first link.
15 . The robot control device of claim 1 , wherein the end effector comprises a wrist part rotatable about a vertical rotation axis and a base body provided to a tip end of the wrist part.
16 . The robot control device of claim 15 , wherein the base body has a Y-shape when viewed in a thickness direction.
17 . The robot control device of claim 1 , wherein the end effector includes a movable member reciprocatable on a center line of the end effector to hold the substrate by pinching.
18 . The robot control device of claim 1 , wherein the installation position is an upper surface of a turntable of a pre-aligner.
19 . The robot control device of claim 1 , wherein the end effector is configured to hold the substrate by suction.
20 . A robot, comprising:
a robotic arm having at least one joint axis; and
an end effector provided to a tip end of the robotic arm and configured to hold a substrate, wherein
the substrate is in a first state where the end effector holds the substrate and the substrate is not placed at an installation position, when the end effector is positioned at a first teaching point above the installation position,
the substrate is in a second state where the end effector does not hold the substrate and the substrate is placed at the installation position, when the end effector is positioned at a second teaching point below the installation position,
the robot switches between the first state and the second state by performing an operation moving the end effector from either one of the first teaching point and the second teaching point to the other one of the first teaching point and the second teaching point, and
the robot performs the operation without stopping the end effector.