IP Library Granted Patent US 12662414
Granted Patent B2
US 12662414 · App. 19/440,069 · Granted Jun 23, 2026

Glass composition for glass substrates containing optical waveguides

Inventors: Lars Martin Otfried Brusberg (Potsdam, DE); Matthew John Dejneka (Corning, NY)
Assignee: CORNING INCORPORATED
C03C3/091C03C3/095C03C3/097C03C21/005G02B6/122G02B2006/12038
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Quick Facts
Patent No.
US 12662414
App. No.
19/440,069
Granted
Jun 23, 2026
Kind
B2
Abstract

Disclosed herein are embodiments of a glass composition including SiO 2 in an amount in a range from 53 mol % to 84 mol %, Al 2 O 3 in an amount in a range from 0.3 mol % to 20 mol %, Na 2 O in an amount in a range from 3 mol % to 16 mol %, and at least one of Cs 2 O or Rb 2 O in an amount in a range from 0.05 mol % to 8 mol %. The glass composition has a first silver ion diffusivity at 110° C. of 5×10 −19 m 2 /s or less, and the glass composition has a second silver ion diffusivity at 350° C. of at least 5×10 −17 m 2 /s at 350° C. The glass composition is particularly suitable for use as a glass substrate of a photonic chip package.

Claims (68)

1 . A glass article, comprising:

a glass substrate comprising glass having a composition, in terms of mol % on a representative oxide basis, comprising:

SiO 2 in an amount in a range from 61 mol % to 84 mol %;

B 2 O 3 in an amount in a range from 0 mol % to 15 mol %;

Li 2 O in an amount in a range from 0 mol % to 4 mol %;

SrO in an amount in a range from 0.25 mol % to 10 mol %; and

at least one of Cs 2 O or Rb 2 O in an amount in a range from 0.05 mol % to 8 mol %;

a first major surface of the glass substrate;

a second major surface of the glass substrate opposite to the first major surface;

a waveguide comprising silver disposed in the glass substate between the first major surface and the second major surface, and closer to the first major surface than the second major surface.

2 . The glass article of claim 1 , wherein the composition comprises no more than 12 mol % Al 2 O 3 .

3 . The glass article of claim 1 , wherein the glass substrate has a silver ion diffusivity of at most 5×10 −19 m 2 /s at a temperature of 110° C.

4 . The glass article of claim 1 , wherein the glass substrate has a silver ion diffusivity of at least 5×10 −17 m 2 /s at 350° C.

5 . The glass article of claim 1 , further comprising a depth of layer of from at least 4 micrometers to less than 80 micrometers for the silver.

6 . The glass article of claim 1 , wherein the waveguide has a width from at least 1 micrometer to no more than 50 micrometers.

7 . The glass article of claim 1 , wherein the waveguide has a refractive index profile comprising a first refractive index (n s ) at the first major surface, a bulk refractive index (n 0 ) of the glass, and a maximum refractive index (n 1 ) within the waveguide such that n 0 <n 1 and such that n 0 ≤n s , and (n s −n 0 )≥0.015.

8 . The glass article of claim 7 , wherein (n s −n 0 )≥0.02, and the waveguide has a propagation loss of 0.1 dB/cm or less at 1310 nm.

9 . A glass article, comprising:

a glass substrate comprising glass having a composition, in terms of mol % on a representative oxide basis, comprising:

SiO 2 in an amount in a range from 53 mol % to 84 mol %;

B 2 O 3 in an amount in a range from 0 mol % to 12.8 mol %;

Li 2 O in an amount in a range from 0 mol % to 4 mol %;

K 2 O in an amount in a range from 0 mol % to 6 mol %;

Rb 2 O in an amount in a range from 0 mol % to 5 mol %; and

alkaline earth metal oxides of the group consisting of MgO, CaO, and SrO, wherein a sum of the alkaline earth metal oxides of the group is in a range from 1 mol % to 16 mol %;

a first major surface of the glass substrate;

a second major surface of the glass substrate opposite to the first major surface;

a waveguide disposed in the glass substate between the first major surface and the second major surface, and closer to the first major surface than the second major surface;

wherein the waveguide has a refractive index profile comprising a first refractive index (n s ) at the first major surface, a bulk refractive index (n 0 ) of the glass, and a maximum refractive index (n 1 ) within the waveguide such that n 0 <n 1 and such that n 0 ≤n s .

10 . The glass article of claim 9 , wherein the glass further comprises B 2 O 3 in an amount in a range from 0 mol % to 12 mol %.

11 . The glass article of claim 9 , wherein the glass substrate has a silver ion diffusivity of at most 5×10 −19 m 2 /s at a temperature of 110° C.

12 . The glass article of claim 9 , wherein the glass substrate has a silver ion diffusivity of at least 5×10 −17 m 2 /s at 350° C.

13 . The glass article of claim 10 , wherein the glass comprises no more than 0.5 mol % in total of trace metal oxides of the group consisting of oxides of iron, chromium, nickel, copper, and arsenic.

14 . The glass article of claim 10 , wherein the first refractive index of the waveguide is a maximum refractive index within the waveguide such that n 0 <n s , and (n s −n 0 )≥0.015.

15 . The glass article of claim 14 , wherein (n s −n 0 )≥0.02.

16 . The glass article of claim 10 , wherein the waveguide has a propagation loss of 0.1 dB/cm or less at 1310 nm.

17 . A glass article, comprising:

a glass substrate comprising glass having a composition, in terms of mol % on a representative oxide basis, comprising:

SiO 2 in an amount in a range from 61 mol % to 82 mol %;

B 2 O 3 in an amount in a range from 0 mol % to 15 mol %;

Li 2 O in an amount in a range from 0 mol % to 4 mol %;

K 2 O in an amount in a range from 0 mol % to 8 mol %; and

Rb 2 O in an amount in a range from 0 mol % to 5 mol %;

a first major surface of the glass substrate;

a second major surface of the glass substrate opposite to the first major surface;

a waveguide comprising silver disposed in the glass substate between the first major surface and the second major surface,

wherein the waveguide has a refractive index profile comprising a first refractive index (n s ) at the first major surface, a bulk refractive index (n 0 ) of the glass, and a maximum refractive index (n 1 ) within the waveguide such that n 0 <n 1 and such that n 0 ≤n s ,

wherein the glass substrate has a silver ion diffusivity of at most 5×10 −19 m 2 /s at a temperature of 110° C., and the glass substrate has a second silver ion diffusivity of at least 5×10 −17 m 2 /s at 350° C., and

wherein the first refractive index of the waveguide is a maximum refractive index within the waveguide such that n 0 <n s and (n s −n 0 )≥0.02.

18 . The glass article of claim 17 , wherein the waveguide has a propagation loss of 0.1 dB/cm or less at 1310 nm.

19 . The glass article of claim 17 , wherein the waveguide comprises a depth of layer in a range of 4 μm to 15 μm below the first major surface.

20 . The glass article of claim 17 , wherein the waveguide comprises a width in a range from 10 μm to 50 μm.

21 . A glass article, comprising:

a glass substrate comprising silicate glass having a composition, in terms of mol % on a representative oxide basis, comprising:

SiO 2 in an amount in a range from 61 mol % to 82 mol %;

B 2 O 3 in an amount in a range from 0 mol % to 15 mol %;

Na 2 O in an amount in a range of 3 mol % to 16 mol %;

K 2 O in an amount in a range from 0 mol % to 8 mol %; and

Rb 2 O in an amount in a range from 0 mol % to 5 mol %;

a first major surface of the glass substrate;

a second major surface of the glass substrate opposite to the first major surface;

a waveguide comprising silver disposed in the glass substate between the first major surface and the second major surface,

wherein the waveguide has a refractive index profile comprising a first refractive index (n s ) at the first major surface, a bulk refractive index (n 0 ) of the glass, and a maximum refractive index (n 1 ) within the waveguide such that n 0 <n 1 and such that n 0 ≤n s ,

wherein the glass substrate has a silver ion diffusivity of at most 5×10 −19 m 2 /s at a temperature of 110° C., and the glass substrate has a second silver ion diffusivity of at least 5×10 −17 m 2 /s at 350° C., and

wherein the first refractive index of the waveguide is a maximum refractive index within the waveguide such that n 0 <n s and (n s −n 0 )≥0.02.

22 . The glass article of claim 21 , wherein the waveguide has a propagation loss of 0.1 dB/cm or less at 1310 nm.

23 . The glass article of claim 21 , wherein the waveguide comprises a depth of layer in a range of 4 μm to 15 μm below the first major surface.

24 . The glass article of claim 21 , wherein the waveguide comprises a width in a range from 10 μm to 50 μm.