Curable composition for imprinting, cured substance, imprint pattern producing method, and method for manufacturing device
Provided are a curable composition for imprinting, which contains a polymerizable compound and a polymerization initiator, in which one of components contained in the composition is a compound which includes a 5-membered ring structure having two or more heteroatoms as ring members; a cured substance of the curable composition for imprinting; an imprint pattern producing method using the curable composition for imprinting; and a method for manufacturing a device, which includes the imprint pattern producing method.
1 . A curable composition for imprinting, comprising:
a polymerizable compound; and
a polymerization initiator,
wherein one of components contained in the composition is a compound which includes a 5-membered ring structure having two or more heteroatoms as ring members, said compound being represented by Formula (1),
in Formula (1), X 1 to X 4 each independently represent O, S, or NR N , R N represents a hydrogen atom or an organic group, and R 1 and R 2 each independently represent a hydrogen atom or an organic group, where R 1 and R 2 may be bonded to each other to form a ring.
2 . The curable composition for imprinting according to claim 1 ,
wherein all carbon atoms included in the 5-membered ring structure as ring members are sp 2 carbon atoms.
3 . The curable composition for imprinting according to claim 1 ,
wherein the compound which includes a 5-membered ring structure having two or more heteroatoms as ring members is a compound having an aromatic organic group.
4 . The curable composition for imprinting according to claim 1 ,
wherein, in Formula (1), X 1 is O and X 2 is NR N .
5 . The curable composition for imprinting according to claim 1 ,
wherein at least one of R 1 or R 2 in Formula (1) is an aromatic organic group.
6 . The curable composition for imprinting according to claim 1 ,
wherein the compound which includes a 5-membered ring structure having two or more heteroatoms as ring members is a compound represented by Formula (2),
in Formula (2), X 3 and X 4 each independently represent O, S, or NR N , R N represents a hydrogen atom or an organic group, and R 3 to R 7 each independently represent a hydrogen atom or an organic group, where R 3 to R 7 may be bonded to each other to form a ring.
7 . The curable composition for imprinting according to claim 1 ,
wherein the polymerization initiator is a polymerization initiator having an acylphosphine oxide group in a molecule.
8 . The curable composition for imprinting according to claim 1 , further comprising:
a mold release agent.
9 . A cured substance obtained by curing the curable composition for imprinting according to claim 1 .
10 . An imprint pattern producing method comprising:
an applying step of applying the curable composition for imprinting according to claim 1 onto a member to be applied, which is selected from the group consisting of a support and a mold;
a contact step of contacting a member which is not selected as the member to be applied from the group consisting of the support and the mold with the curable composition for imprinting as a contact member;
a curing step of forming the curable composition for imprinting into a cured substance; and
a peeling step of peeling off the mold from the cured substance.
11 . The imprint pattern producing method according to claim 10 ,
wherein the support is a member including a closely adhesive layer on a surface on a side to which the curable composition for imprinting is applied.
12 . A method for manufacturing a device, comprising:
the imprint pattern producing method according to claim 10 .