Gas transport system
View Patent ↗A conduit system for transporting gas from a gas containing chamber for processing a substrate from which semiconductor devices are formed includes a liner with a spiral vent. The conduit system utilizes a curtain of gas to prevent or reduce deposition of material onto an inner surface of the conduit transporting the gas from the gas containing chamber.
1 . A gas curtain device comprising:
a conduit liner, the conduit liner including a spiral vent passing though the conduit liner, wherein a pitch between adjacent spiral vents along a length of the conduit liner is variable; and
a conduit joint surrounding a portion of the conduit liner, the conduit joint including a plurality of gas inlet ports in fluid communication with the spiral vent of the conduit liner, wherein an internal surface of the conduit joint includes a beveled surface.
2 . The gas curtain device of claim 1 , wherein the conduit liner includes a conduit finger extending from an exterior surface of the conduit liner.
3 . The gas curtain device of claim 1 , wherein the conduit liner has an outside diameter that is less than an inside diameter of the conduit joint.
4 . The gas curtain device of claim 1 , wherein the plurality of gas inlet ports is three or more.
5 . The gas curtain device of claim 1 , further comprising a seal contacting the conduit joint.
6 . The gas curtain device of claim 1 , wherein the conduit liner has an outer diameter and the conduit joint has an inner diameter, the outer diameter of the conduit liner being less than the inner diameter of the conduit joint.
7 . The gas curtain device of claim 1 , wherein the pitch between adjacent spiral vents along a length of the conduit liner decreases toward a first end of the conduit liner.
8 . A method for transporting a gas, comprising:
flowing, through an exhaust conduit, an exhaust gas from a gas containing chamber for processing a substrate;
flowing a purge gas into one of a plurality of gas inlet ports of an exhaust conduit joint, wherein an internal surface of the conduit joint includes a beveled surface;
flowing the purge gas through a spiral vent in an exhaust conduit liner within the exhaust gas conduit; and
creating a curtain of purge gas along an internal surface of the exhaust conduit liner,
wherein a pitch between adjacent spiral vents along a length of the conduit liner is variable.
9 . The method of claim 8 , wherein the exhaust gas conduit liner has an outer diameter and the exhaust conduit has an inner diameter, the outer diameter of the exhaust conduit liner being less than the inner diameter of the exhaust conduit.
10 . The method of claim 9 , wherein the outer diameter of the exhaust conduit liner is 85-95% of the inner diameter of the exhaust conduit.
11 . The method of claim 8 , wherein the flowing a purge gas into a plurality of gas inlet ports in an exhaust conduit joint includes flowing the purge gas into three or more purge gas inlet ports in the exhaust conduit joint.
12 . The method of claim 8 , wherein the spiral vent in the exhaust conduit liner has a width W 1 measured along length of the exhaust conduit liner and the spiral vent in the exhaust conduit liner has a width W 2 measured along the length of the exhaust conduit liner at a location downstream of a location where W 1 is measured, W 2 being larger than W 1 .
13 . A conduit system for transporting a gas comprising:
a conduit in fluid communication with a processing chamber for a semiconductor substrate;
a conduit liner within the conduit, the conduit liner including a spiral vent, the width of the spiral vent being variable along the length of the conduit liner;
a conduit joint surrounding a portion of the conduit liner and surrounding a portion of the conduit, the conduit joint including a plurality of gas inlet ports, the gas inlet ports in fluid communication with an interior of the conduit;
a conduit finger extending from an exterior of the conduit liner, the conduit finger contacting the conduit; and
a seal between the conduit and the conduit joint.
14 . The conduit system of claim 13 , wherein the pitch between adjacent spiral vents along a length of the conduit liner decreases toward a first end of the conduit liner.
15 . The conduit system of claim 13 , wherein the spiral vent includes a plurality of adjacent spiral sections, and the pitch between adjacent spiral sections of the spiral vent along a length of the conduit liner is variable.
16 . The conduit system of claim 15 , wherein a pitch between adjacent sections of the spiral vent along a length of the conduit is variable.
17 . The conduit system of claim 13 , wherein the conduit liner has an outer diameter and the conduit having an inner diameter, the outer diameter of the conduit liner being less than the inner diameter of the conduit.
18 . The conduit system of claim 13 , wherein the plurality of gas inlet ports is three or more.
19 . The conduit system of claim 13 , wherein the spiral vent has a width W 1 measured along length of the conduit liner near the conduit joint and the spiral vent has a width W 2 measured along the length of the conduit liner at a location that is further from the conduit joint than a location where W 1 is measured, W 2 being larger than W 1 .
20 . The conduit system of claim 13 , wherein an end of the conduit liner includes a flange.