IP Library › Granted Patent US 12663326
Granted Patent B2
US 12663326 · App. 18/112,043 · Granted Jun 23, 2026

Method for manufacturing force sensor

Inventors: Yoshikane Tanaami (Nagoya, JP); Miyuki Hayashi (Nagoya, JP); Yoshiaki Kanamori (Sendai, JP); Taiyu Okatani (Sendai, JP)
Assignees: SINTOKOGIO, LTD.; TOHOKU UNIVERSITY
G01L5/10B32B15/04G01L1/005
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Quick Facts
Patent No.
US 12663326
App. No.
18/112,043
Granted
Jun 23, 2026
Kind
B2
Abstract

Provided is a method for manufacturing a force sensor including: preparing a first substrate which is made of a material that transmits electromagnetic waves and includes on its surface a metal array arranged in a periodic pattern and a second substrate which includes on its surface a metal layer that reflects electromagnetic waves; forming a spacer member on the surface of the first substrate; forming a first metal layer around the spacer member on the surface of the first substrate; forming a second metal layer in a region corresponding to the first metal layer on the second substrate; and fusing the first metal layer and the second metal layer together to fix the first substrate and the second substrate in a state in which the spacer member formed on the surface of the first substrate abuts the surface of the second substrate.

Claims (25)

1 . A method for manufacturing a force sensor comprising:

preparing a first substrate which is made of a material that transmits electromagnetic waves and includes on its surface a metal array arranged in a periodic pattern and a second substrate which includes on its surface a metal layer that reflects electromagnetic waves;

forming a spacer member around the metal array on the surface of the first substrate;

forming a first metal layer thinner than the spacer member around the spacer member on the surface of the first substrate;

forming a second metal layer thinner than the spacer member in a region corresponding to the first metal layer on the second substrate; and

fusing the first metal layer and the second metal layer together to fix the first substrate and the second substrate in a state in which the spacer member formed on the surface of the first substrate abuts the surface of the second substrate.

2 . The method for manufacturing a force sensor according to claim 1 , wherein the first metal layer and the second metal layer are made of the same material.

3 . The method for manufacturing a force sensor according to claim 1 , wherein the first metal layer is separated from the spacer member.

4 . A method for manufacturing a force sensor comprising:

preparing a first substrate which is made of a material that transmits electromagnetic waves and includes on its surface a metal array arranged in a periodic pattern and a second substrate which includes on its surface a metal layer that reflects electromagnetic waves;

forming a spacer member around the metal layer on the surface of the second substrate;

forming a first metal layer thinner than the spacer member around the spacer member on the surface of the second substrate;

forming a second metal layer thinner than the spacer member in a region corresponding to the first metal layer on the first substrate; and

fusing the first metal layer and the second metal layer together to fix the spacer member formed on the surface of the second substrate in a state in which it abuts the surface of the first substrate.

5 . The method for manufacturing a force sensor according to claim 4 , wherein the first metal layer and the second metal layer are made of the same material.

6 . The method for manufacturing a force sensor according to claim 4 , wherein the first metal layer is separated from the spacer member.

7 . A method for manufacturing a force sensor comprising:

preparing a first substrate which is made of a material that transmits electromagnetic waves and includes on its surface a metal array arranged in a periodic pattern and a second substrate which includes on its surface a metal layer that reflects electromagnetic waves;

forming a first spacer member around the metal array on the surface of the first substrate;

forming a first metal layer around the first spacer member on the surface of the first substrate;

forming a second spacer member in a region corresponding to the first spacer member and around the metal layer on the surface of the second substrate;

forming a second metal layer on the surface of the second substrate in a region corresponding to the first metal layer and around the second spacer member; and

fusing the first metal layer and the second metal layer together to fix the first substrate and the second substrate in a state in which the first spacer member formed on the surface of the first substrate abuts the second spacer member formed on the surface of the second substrate.

8 . The method for manufacturing a force sensor according to claim 7 , wherein the first metal layer and the second metal layer are made of the same material.

9 . The method for manufacturing a force sensor according to claim 7 , wherein the first metal layer is separated from the first spacer member and the second metal layer is separated from the second spacer member.