IP Library › Granted Patent US 12,663,466
Granted Patent B2
US 12,663,466 · App. 18/471,270 · Granted Jun 23, 2026

Voice coil leaf spring prober

Inventors: Timothy James Vanderwerf (Ithaca, NY); Alex G Chernyakov (Ithaca, NY)
Assignee: MACOM Technology Solutions Holdings, Inc.
G01R31/2887G01R1/06722G01R1/06733G01R1/07392G01R31/2891G01R31/2831
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Quick Facts
Patent No.
US 12,663,466
App. No.
18/471,270
Granted
Jun 23, 2026
Kind
B2
Abstract

Aspects of the present disclosure describe a voice coil actuated leaf spring prober that advantageously may be operated to probe every individual device (device under test—DUT) comprising a contemporary wafer. The prober according to aspects of the present disclosure includes one or more probe needles attached in an electrically isolated arrangement to an end of a horizontal-U-shaped, recurved, leaf spring arrangement. The prober includes—for example—a voice coil actuator positioned within the horizontal-U-shaped portion of the leaf spring which—when operated—results in leaf spring displacement and probe needle movement such that it may mechanically/electrically contact the DUT.

Claims (52)

1 . A test probe assembly comprising:

a leaf spring;

a needle probe mechanically attached to a distal end of the leaf spring; and

an actuator operative to deflect a portion of the leaf spring and the attached needle probe;

wherein the leaf spring exhibits a U-shape defining a recurved interior space, the actuator is a voice coil actuator at least partially disposed within the recurved interior space of the leaf spring, and the needle probe is oriented at an angle relative to a horizontal surface of a device under test such that the needle probe makes a scrubbing contact with the device under test.

2 . The test probe assembly of claim 1 wherein the U-shaped leaf spring further includes a stationary member portion, a movable member portion, and a U-bent portion that is bent in the U-shape and located between the stationary member portion and the movable member portion.

3 . The test probe assembly of claim 2 wherein the attached needle probe is electrically isolated from the U-shaped leaf spring.

4 . The test probe assembly of claim 3 wherein the attached needle probe is configured to be between 0 degrees and 75 degrees relative to a horizontal surface of the device under test.

5 . The test probe assembly of claim 4 wherein the actuator includes a fixed portion and a moving portion, the fixed portion contacting the stationary member portion and the moving portion contacting the movable member portion, such that when the actuator is operated, the movable member portion is deflected.

6 . The test probe assembly of claim 5 wherein the movable member portion includes a surface recess that receives an end of the moving portion of the actuator.

7 . The test probe assembly of claim 6 wherein the leaf spring comprises a thermally stable material.

8 . The test probe assembly of claim 7 wherein the test probe assembly comprises a plurality of individual test probes.

9 . A method of operating a test probe assembly comprising

a U-shaped leaf spring, wherein the U-shape defines a recurved interior space;

a needle probe mechanically attached to a distal end of the leaf spring; and

an actuator operative to deflect a portion of the leaf spring and the attached needle probe;

the method comprising

positioning a device to be tested proximate to the test probe assembly;

operating the actuator to deflect a portion of the leaf spring and the attached needle probe such that the needle probe mechanically and electrically contacts a test pad on the device to be tested; and

conducting a test by applying electrical signals to the device to be tested via the needle probe;

wherein the leaf spring U-shape defines a recurved interior space, the actuator is a voice coil actuator at least partially disposed within the recurved interior space of the leaf spring, and the needle probe is oriented at an angle relative to a horizontal surface of the device under test such that the needle probe makes a scrubbing contact with the device to be tested.

10 . A computer-implemented test system comprising:

a U-shaped leaf spring;

a needle probe mechanically attached to a distal end of the leaf spring; and

an actuator operative to deflect a portion of the leaf spring and the attached needle probe; and

a computer operatively connected to the actuator and needle probe and programmed to execute a computer program which when executed causes positioning a device to be tested proximate to the test probe assembly;

operating the actuator to deflect a portion of the leaf spring and the attached needle probe such that the needle probe mechanically and electrically contacts a test pad on the device to be tested; and

conducting a test by applying electrical signals to the device to be tested via the needle probe;

wherein the leaf spring U-shape defines a recurved interior space, the actuator is a voice coil actuator at least partially disposed within the recurved interior space of the leaf spring, and the needle probe is oriented at an angle relative to a horizontal surface of the device under test such that the needle probe makes a scrubbing contact with the device to be tested.

11 . A non-transitory computer storage medium having computer executable instructions which when executed by a computer cause the computer to perform operations for a computer-implemented test system comprising:

a U-shaped leaf spring;

a needle probe mechanically attached to a distal end of the leaf spring; and

an actuator operative to deflect a portion of the leaf spring and the attached needle probe; and

a computer operatively connected to the actuator and needle probe and when operated according to the executable instructions causes

positioning a device to be tested proximate to the test probe assembly;

operating the actuator to deflect a portion of the leaf spring and the attached needle probe such that the needle probe mechanically and electrically contacts a test pad on the device to be tested; and

conducting a test by applying electrical signals to the device to be tested via the needle probe;

wherein the leaf spring U-shape defines a recurved interior space, the actuator is a voice coil actuator at least partially disposed within the recurved interior space of the leaf spring, and the needle probe is oriented at an angle relative to a horizontal surface of the device to be tested such that the needle probe makes a scrubbing contact with the device to be tested.

12 . A test probe arrangement comprising:

a leaf spring;

a needle probe mechanically attached to a distal end of the leaf spring; and

an actuator operative to deflect a portion of the leaf spring and the attached needle probe;

wherein the distal end of the leaf spring is bent, such that the attached needle probe is less than 90 degrees off horizontal;

wherein the leaf spring exhibits a U-shape that defines a recurved interior space, the actuator is a voice coil actuator at least partially disposed within the recurved interior space of the leaf spring, and the needle probe is oriented at an angle relative to a horizontal surface of a device under test such that the needle probe makes a scrubbing contact with the device under test.

13 . The test probe arrangement of claim 12 further comprising a stationary stage having a proximal end of the leaf spring attached thereto.

14 . The test probe arrangement of claim 13 wherein the attached needle probe is electrically isolated from the leaf spring.

15 . The test probe arrangement of claim 14 wherein the attached needle probe is configured to be between 0 degrees and 75 degrees relative to a horizontal surface of the device under test.

16 . The test probe arrangement of claim 15 further comprising a stiffening groove formed along a length of the leaf spring.

17 . The test probe arrangement of claim 16 wherein the actuator is positioned between the stationary stage and the leaf spring such that the leaf spring and attached needle probe is deflected when the actuator is operated.

18 . The test probe arrangement of claim 17 further comprising a receiving dimple formed in a portion of the leaf spring.

19 . The test probe assembly of claim 1 , wherein the actuator comprises a movable drive element that abuts the leaf spring to apply a drive force in a first direction, and wherein the movable drive element is mechanically uncoupled from the leaf spring in a second direction opposite the first direction, such that the leaf spring returns to a neutral position via a restorative force of the leaf spring itself.

20 . The test probe assembly of claim 1 wherein the leaf spring comprises a nickel-iron alloy exhibiting a desirable coefficient of thermal expansion.