Probe card test system and method

1 . A probe card test system comprising:

a loader for loading and placing a probe card for testing electrical properties of a substrate, on a holder;

an inverter for transferring the probe card placed on the holder, to a preliminary position by inverting the probe card;

a transferer for transferring the probe card transferred to the preliminary position, to a test table;

a test table mover for precisely moving the test table in a first direction to test probe pins of the probe card;

an optical system for optically testing the probe pins of the probe card; and

an optical system mover for precisely moving the optical system or the test table in a second direction perpendicular to the first direction, to test all the probe pins of the probe card.

2 . The probe card test system of claim 1 , wherein the inverter comprises:

a first clamp head for clamping two sides of the probe card placed on the holder with the probe pins facing downward; and

a rotating arm connected to the first clamp head at an end and to a rotating shaft at another end and rotating around the rotating shaft to invert the first clamp head such that the probe pins of the probe card face upward.

3 . The probe card test system of claim 2 , wherein the first clamp head comprises:

a first head body provided to correspond to the probe card;

a first finger provided to move forward or backward on a portion of the first head body so as to be in contact with a first portion of the probe card; and

a second finger provided to move forward or backward on another portion of the first head body so as to be in contact with a second portion of the probe card.

4 . The probe card test system of claim 3 , wherein the first finger comprises:

a first horizontal portion provided in a shape corresponding to a portion of a top surface of the first head body to slide along the first head body;

a first vertical portion connected to the first horizontal portion to move toward or away from the first portion of the probe card; and

a first recessed portion provided in a surface of the first vertical portion facing the probe card and provided in a concave or arc shape to correspond to the first portion of the probe card, and

wherein the second finger comprises:

a second horizontal portion provided in a shape corresponding to another portion of the top surface of the first head body to slide along the first head body;

a second vertical portion connected to the second horizontal portion to move toward or away from the second portion of the probe card; and

a second recessed portion provided in a surface of the second vertical portion facing the probe card and provided in a concave or arc shape to correspond to the second portion of the probe card.

5 . The probe card test system of claim 4 , wherein the first clamp head further comprises a pin pusher for pushing a pin toward a pinhole provided in the probe card to fix the probe card, and

wherein the pin pusher comprises:

the pin provided in a shape corresponding to the pinhole provided in the probe card so as to be insertable into the pinhole, and provided to move forward or backward through a through-hole provided in the first head body;

an elastic member for applying a restoring force in a direction in which the pin moves backward; and

a cam protrusion mounted on a surface of the first horizontal portion facing the pin so as to press the pin forward depending on a position to which the first finger slides.

6 . The probe card test system of claim 5 , wherein, to fix probe cards of various diameters depending on a slide position of the first finger, the pin pusher comprises:

a first pin pusher mounted at a first slide position; and

a second pin pusher mounted at a second slide position different from the first slide position.

7 . The probe card test system of claim 4 , wherein the transferer comprises:

a second clamp head for clamping other two sides of the probe card transferred to the preliminary position so as not to interfere with the first clamp head of the inverter;

a first movable plate connected to the second clamp head and capable of reciprocating to transfer the second clamp head from the preliminary position to the test table; and

a first rail mounted above the second clamp head to guide the first movable plate in the first direction.

8 . The probe card test system of claim 7 , wherein the second clamp head comprises:

a second head body provided to correspond to the probe card;

a third finger provided to move forward or backward on a portion of the second head body so as to be in contact with a third portion of the probe card; and

a fourth finger provided to move forward or backward on another portion of the second head body so as to be in contact with a fourth portion of the probe card.

9 . The probe card test system of claim 8 , wherein the third finger comprises:

a third horizontal portion provided in a shape corresponding to a portion of a top surface of the second head body to slide along the second head body;

a third vertical portion connected to the third horizontal portion to move toward or away from the third portion of the probe card; and

a third recessed portion provided in a surface of the third vertical portion facing the probe card and provided in a concave or arc shape to correspond to the third portion of the probe card, and

wherein the fourth finger comprises:

a fourth horizontal portion provided in a shape corresponding to another portion of the top surface of the second head body to slide along the second head body;

a fourth vertical portion connected to the fourth horizontal portion to move toward or away from the fourth portion of the probe card; and

a fourth recessed portion provided in a surface of the fourth vertical portion facing the probe card and provided in a concave or arc shape to correspond to the fourth portion of the probe card.

10 . The probe card test system of claim 9 , wherein a first virtual line which connects the first and second portions of the probe card passes through a center point of the probe card, and

wherein a second virtual line which connects the third and fourth portions of the probe card passes through the center point of the probe card perpendicularly to the first virtual line.

11 . The probe card test system of claim 10 , wherein the first virtual line extends in a direction which is the same as the first direction, and

wherein the second virtual line extends in a direction which is the same as the second direction.

12 . The probe card test system of claim 6 , wherein the transferer further comprises a lift provided between the second clamp head and the first movable plate to raise or lower the second clamp head.

13 . The probe card test system of claim 1 , wherein the test table mover comprises:

a second movable plate connected to the test table and capable of reciprocating from a first test position to a second test position;

a second rail mounted under the second movable plate to guide the second movable plate in the first direction; and

a base for supporting the second rail.

14 . The probe card test system of claim 1 , wherein the optical system comprises:

a scan test camera for scan-testing the probe pins of the probe card at a low magnification; and

a precise test camera disposed next to the scan test camera to precisely test the probe pins, which require a precise test, at a high magnification.

15 . The probe card test system of claim 14 , wherein the precise test camera is at least partially raised or lowered to move a focus.

16 . The probe card test system of claim 1 , wherein the optical system mover comprises:

a third movable plate connected to the optical system and capable of reciprocating from a first imaging position to a second imaging position;

a third rail for guiding the third movable plate in the second direction; and

a base for supporting the third rail.

17 . The probe card test system of claim 1 , wherein the holder substantially has a ring shape or a short pipe shape with a hollow to protect the probe pins provided on a bottom surface of the probe card.

18 . The probe card test system of claim 1 , wherein the loader is a loader/unloader for unloading the probe card which has been completely tested and returned to the holder through the transferer and the inverter.

19 . A probe card test method comprising:

(a) loading and placing a probe card for testing electrical properties of a substrate, on a holder;

(b) transferring the probe card placed on the holder, to a preliminary position by inverting the probe card;

(c) transferring the probe card transferred to the preliminary position, to a test table;

(d) precisely moving the test table in a first direction to test probe pins of the probe card;

(e) testing the probe pins of the probe card by using an optical system; and

(f) precisely moving the optical system or the test table in a second direction perpendicular to the first direction, to test all the probe pins of the probe card.

20 . A probe card test system comprising:

a loader for loading and placing a probe card for testing electrical properties of a substrate, on a holder;

an inverter for transferring the probe card placed on the holder, to a preliminary position by inverting the probe card;

a transferer for transferring the probe card transferred to the preliminary position, to a test table;

a test table mover for precisely moving the test table in a first direction to test probe pins of the probe card;

an optical system for optically testing the probe pins of the probe card; and

an optical system mover for precisely moving the optical system or the test table in a second direction perpendicular to the first direction, to test all the probe pins of the probe card,

wherein the inverter comprises:

a first clamp head for clamping two sides of the probe card placed on the holder with the probe pins facing downward; and

a rotating arm connected to the first clamp head at an end and to a rotating shaft at another end and rotating around the rotating shaft to invert the first clamp head such that the probe pins of the probe card face upward,

wherein the first clamp head comprises:

a first head body provided to correspond to the probe card;

a first finger provided to move forward or backward on a portion of the first head body so as to be in contact with a first portion of the probe card; and

a second finger provided to move forward or backward on another portion of the first head body so as to be in contact with a second portion of the probe card,

wherein the first finger comprises:

a first horizontal portion provided in a shape corresponding to a portion of a top surface of the first head body to slide along the first head body;

a first vertical portion connected to the first horizontal portion to move toward or away from the first portion of the probe card; and

a first recessed portion provided in a surface of the first vertical portion facing the probe card and provided in a concave or arc shape to correspond to the first portion of the probe card,

wherein the second finger comprises:

a second horizontal portion provided in a shape corresponding to another portion of the top surface of the first head body to slide along the first head body;

a second vertical portion connected to the second horizontal portion to move toward or away from the second portion of the probe card; and

a second recessed portion provided in a surface of the second vertical portion facing the probe card and provided in a concave or arc shape to correspond to the second portion of the probe card,

wherein the first clamp head further comprises a pin pusher for pushing a pin toward a pinhole provided in the probe card to fix the probe card,

wherein the transferer comprises:

a second clamp head for clamping other two sides of the probe card transferred to the preliminary position so as not to interfere with the first clamp head of the inverter;

a first movable plate connected to the second clamp head and capable of reciprocating to transfer the second clamp head from the preliminary position to the test table; and

a first rail mounted above the second clamp head to guide the first movable plate in the first direction,

wherein the transferer further comprises a lift provided between the second clamp head and the first movable plate to raise or lower the second clamp head,

wherein the test table mover comprises:

a second movable plate connected to the test table and capable of reciprocating from a first test position to a second test position;

a second rail mounted under the second movable plate to guide the second movable plate in the first direction; and

a base for supporting the second rail,

wherein the optical system comprises:

a scan test camera for scan-testing the probe pins of the probe card at a low magnification; and

a precise test camera disposed next to the scan test camera to precisely test the probe pins, which require a precise test, at a high magnification,

wherein the optical system mover comprises:

a third movable plate connected to the optical system and capable of reciprocating from a first imaging position to a second imaging position;

a third rail for guiding the third movable plate in the second direction; and

a base for supporting the third rail, and

wherein the holder substantially has a ring shape or a short pipe shape with a hollow to protect the probe pins provided on a bottom surface of the probe card.