Imprinting apparatus
An imprinting apparatus comprises a first carrier for carrying a flexible stamp, a set of carrier actuators for translating the first carrier in a direction parallel to a plane of the first carrier, and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second carrier comprises a chuck and a set of chuck actuators for translating a portion of the chuck in a direction perpendicular to a plane of the second carrier. This imprinting apparatus provides alignment between the flexible stamp and the substrate by controlling an in-plane position of the first carrier (so enabling X, Y and Rz position control) and controlling Z axis positions of the second carrier (so enabling Rx, Ry and Z position control). Thus, 6DOF position adjustment is enabled with a simple structure. Thus precise control of X, Y and Z translations and rotations is enabled while also enabling loading of substrates and/or stamps.
1 . An imprinting apparatus for use with a flexible stamp, the imprinting apparatus comprising:
a first carrier for carrying the flexible stamp, the first carrier configured to pull and push portions of the flexible stamp towards and away from the first carrier;
a set of carrier actuators for translating the first carrier in a direction parallel to a plane of the first carrier; and
a second carrier movable relative to the first carrier,
wherein the second carrier comprises:
a chuck configured to carry a substrate having a resist layer; and
a set of chuck actuators for translating a portion of the chuck in a direction perpendicular to a plane of the second carrier, and
wherein the imprinting apparatus maintains a gap between a portion of the flexible stamp and a portion of the substrate during an imprinting process.
2 . The apparatus of claim 1 , wherein the first carrier comprises an array of actuators for pulling the flexible stamp towards the first carrier and for pushing the flexible stamp away from the first carrier.
3 . The apparatus of claim 1 , wherein the first carrier comprises:
an aperture plate; and
a frame around the aperture plate, wherein the carrier actuators are for translating the frame.
4 . The apparatus of claim 1 , wherein each carrier actuator comprises:
a linear actuator; and
a flexure between the linear actuator and the frame.
5 . The apparatus of claim 3 , wherein there are three carrier actuators in the set.
6 . The apparatus of claim 2 , wherein each carrier actuator is coupled to the frame by an air bearing arrangement.
7 . The apparatus of claim 6 , wherein each air bearing arrangement comprises an upper air bearing and a lower air bearing.
8 . The apparatus of claim 1 , wherein the apparatus comprises:
a main frame; and
a main frame actuator for translating the main frame in a direction perpendicular to the plane of the second carrier.
9 . The apparatus of claim 8 , wherein the second carrier further comprises a sub-frame, and wherein the sub-frame is connected to the main frame and the chuck is mounted to the sub-frame.
10 . The apparatus of claim 1 , wherein the chuck comprises a set of position sensors for measuring a distance from a surface of the chuck to the first carrier.
11 . The apparatus of claim 1 , wherein each chuck actuator comprises an actuator output and a lever arrangement between the actuator output and a chuck drive member.
12 . The apparatus of claim 11 , wherein the lever arrangement comprises a first pivot between a fixed lever portion and a movable lever portion.
13 . The apparatus of claim 1 , further comprising a stamp landing ring around an outside of the chuck, and wherein the stamp landing ring is for facing the first carrier outside the area of the flexible stamp.
14 . The apparatus of claim 13 , further comprising a set of landing ring actuators for translating a portion of the stamp landing ring in a direction perpendicular to the plane of the second carrier.
15 . The apparatus of claim 7 , wherein a portion of the frame is sandwiched between the upper and lower air bearings.
16 . The apparatus of claim 8 , wherein the main frame actuator has a larger stroke than said chuck actuators.
17 . The apparatus of claim 9 , wherein the sub-frame is mounted to the main frame by a spring arrangement for biasing the sub-frame against the first carrier through a kinematic coupling during imprinting.
18 . The apparatus of claim 12 , wherein the lever arrangement providing a reduction in displacement between the actuator output and the chuck driver member.
19 . The apparatus of claim 13 , wherein the second carrier comprises a set of position sensors for measuring a distance from the stamp landing ring to the first carrier.