Clock signal distribution system, integrated circuit device and method
A clock distribution system includes a clock mesh structure which has first metal patterns extending along a first axis, second metal patterns extending along a second axis, third metal patterns extending along a third axis. The first metal patterns, second metal patterns, and third metal patterns are electrically coupled with each other. The second axis is transverse to the first axis. The third axis is oblique to both the first axis and the second axis. The first metal patterns include a main first metal pattern, and other first metal patterns. The second metal patterns include a main second metal pattern, and other second metal patterns. The third metal patterns include a main third metal pattern, and other third metal patterns. The main third metal pattern overlaps the main first metal pattern and the main second metal pattern, without overlapping the other first metal patterns or the other second metal patterns.
1 . A clock distribution system, comprising:
a clock mesh structure comprising:
a plurality of first metal patterns extending along a first axis,
a plurality of second metal patterns extending along a second axis, and
a plurality of third metal patterns extending along a third axis,
wherein
the plurality of first metal patterns, the plurality of second metal patterns, and the plurality of third metal patterns are electrically coupled with each other,
the second axis is transverse to the first axis,
the third axis is oblique to both the first axis and the second axis,
the plurality of first metal patterns comprises a main first metal pattern, and other first metal patterns different from the main first metal pattern,
the plurality of second metal patterns comprises a main second metal pattern, and other second metal patterns different from the main second metal pattern,
the plurality of third metal patterns comprises a main third metal pattern, and other third metal patterns different from the main third metal pattern, and
the main third metal pattern overlaps the main first metal pattern and the main second metal pattern, without overlapping the other first metal patterns or the other second metal patterns.
2 . The clock distribution system of claim 1 , further comprising a clock driver, wherein
the main first metal pattern, the main second metal pattern and the main third metal pattern are electrically coupled to the clock driver to receive a clock signal from the clock driver and to distribute the clock signal throughout the clock mesh structure.
3 . The clock distribution system of claim 2 , further comprising a plurality of further clock drivers or clock loads, wherein
the plurality of further clock drivers or clock loads have inputs coupled to corresponding points in the clock mesh structure to receive the clock signal from the clock mesh structure.
4 . The clock distribution system of claim 1 , wherein
the clock mesh structure further comprises a plurality of fourth metal patterns extending along a fourth axis, and electrically coupled to the plurality of first metal patterns, the plurality of second metal patterns and the plurality of third metal patterns, and
the fourth axis is transverse to the third axis, and is oblique to both the first axis and the second axis.
5 . The clock distribution system of claim 4 , wherein
the plurality of fourth metal patterns comprises a main fourth metal pattern, and other fourth metal patterns different from the main fourth metal pattern, and
the main fourth metal pattern overlaps the main first metal pattern, the main second metal pattern, and the main third metal pattern at a center of the clock mesh structure, without overlapping the other first metal patterns or the other second metal patterns.
6 . The clock distribution system of claim 5 , wherein
the other first metal patterns, the other second metal patterns, the other third metal patterns and the other fourth metal patterns form a plurality of concentric polygons having a common center at the center of the clock mesh structure.
7 . The clock distribution system of claim 6 , wherein
the main first metal pattern, the main second metal pattern, the main third metal pattern and the main fourth metal pattern extend outside an outermost concentric polygon of the plurality of concentric polygons.
8 . The clock distribution system of claim 5 , wherein
the main first metal pattern overlaps one or more of the other second metal patterns, without overlapping the other third metal patterns and the other fourth metal patterns,
the main second metal pattern overlaps one or more of the other first metal patterns, without overlapping the other third metal patterns and the other fourth metal patterns,
the main third metal pattern overlaps one or more of the other fourth metal patterns, without overlapping the other first metal patterns and the other second metal patterns, and
the main fourth metal pattern overlaps one or more of the other third metal patterns, without overlapping the other first metal patterns and the other second metal patterns.
9 . The clock distribution system of claim 5 , wherein
the clock mesh structure is arranged in each polygonal region among a plurality of polygonal regions arranged in a repeating manner and abutting each other, and
for each corner of each polygonal region among the plurality of polygonal regions,
the main third metal pattern or the main fourth metal pattern of the corresponding clock mesh structure extends from inside the polygonal region to the corner.
10 . The clock distribution system of claim 9 , wherein
the plurality of polygonal regions comprises square regions in each of which the other first metal patterns, the other second metal patterns, the other third metal patterns and the other fourth metal patterns of the corresponding clock mesh structure form a plurality of concentric octagons.
11 . A method, comprising:
forming a circuit region over a substrate; and
forming a plurality of metal patterns over the circuit region, and electrically coupling the plurality of metal patterns to form a clock mesh structure which is electrically coupled to the circuit region,
wherein
the clock mesh structure comprises a plurality of polygonal regions of a same shape other than an octagon, arranged in a repeating manner and abutting each other, and
each of the plurality of polygonal regions comprises therein at least one octagon having sides each being a metal pattern among the plurality of metal patterns.
12 . The method of claim 11 , wherein
the shape of the plurality of polygonal regions is a tessellable polygon.
13 . The method of claim 11 , wherein
in each polygonal region of the plurality of polygonal regions, the at least one octagon comprises a plurality of concentric octagons having a common center at a center of the polygonal region.
14 . The method of claim 13 , wherein
the plurality of polygonal regions are identical to each other.
15 . The method of claim 11 , wherein
in each polygonal region of the plurality of polygonal regions, the at least one octagon comprises three concentric octagons having a common center at a center of the polygonal region.
16 . A clock distribution system, comprising:
a clock mesh structure comprising:
a plurality of first metal patterns extending along a first axis,
a plurality of second metal patterns extending along a second axis,
a plurality of third metal patterns extending along a third axis, and
a plurality of fourth metal patterns extending along a fourth axis,
wherein
the plurality of first metal patterns, the plurality of second metal patterns, the plurality of third metal patterns and the plurality of fourth metal patterns are electrically coupled with each other,
the second axis is transverse to the first axis,
the fourth axis is transverse to the third axis,
the third axis and the fourth axis are oblique to both the first axis and the second axis,
the clock mesh structure is arranged in each polygonal region among a plurality of polygonal regions arranged in a repeating manner and abutting each other,
the plurality of polygonal regions comprises first and second polygonal regions abutting each other along a first common boundary elongated along the first axis, and
no first metal pattern among the plurality of first metal patterns is arranged on the first common boundary.
17 . The clock distribution system of claim 16 , wherein
the plurality of polygonal regions further comprises a third polygonal region abutting the second polygonal region along a second common boundary elongated along the second axis, and
no second metal pattern among the plurality of second metal patterns is arranged on the second common boundary.
18 . The clock distribution system of claim 16 , wherein
no first metal patterns among the plurality of first metal patterns and no second metal patterns among the plurality of second metal patterns are arranged on common boundaries of abutting polygonal regions among the plurality of polygonal regions.
19 . The clock distribution system of claim 16 , wherein
the plurality of first metal patterns, the plurality of second metal patterns, the plurality of third metal patterns and the plurality of fourth metal patterns form, in each polygonal region of the plurality of polygonal regions, a plurality of concentric octagons.
20 . The clock distribution system of claim 16 , wherein
the plurality of first metal patterns, the plurality of second metal patterns, the plurality of third metal patterns and the plurality of fourth metal patterns form, in each polygonal region of the plurality of polygonal regions, a plurality of concentric octagons having a common center at a center of the polygonal region.