Memory device having a support structure
A memory device includes a first outer support structure extending along a first direction. The memory device also includes a first protrusion pattern extending along the first direction, the first protrusion pattern being in contact with an end of the first outer support structure. The memory device further includes a connection support structure spaced apart from the first protrusion pattern along a second direction perpendicular to the first direction. The memory device additionally includes a first oblique support structure connecting the connection support structure and the first outer support structure to each other in an oblique direction to the first and second directions.
1 . A memory device comprising:
a first outer support structure extending along a first direction;
a first protrusion pattern extending along the first direction, the first protrusion pattern being in contact with an end of the first outer support structure;
a connection support structure spaced apart from the first protrusion pattern along a second direction perpendicular to the first direction; and
a first oblique support structure connecting the connection support structure and the first outer support structure to each other in a first oblique direction to the first and second directions.
2 . The memory device of claim 1 , wherein the memory device further comprises a gap having a triangular shape located between the first protrusion pattern, on one side, and the connection support structure and the first oblique support structure, on another side.
3 . The memory device of claim 1 , wherein an interior angle formed by the first protrusion pattern and the first oblique support structure is less than 90 degrees.
4 . The memory device of claim 1 , wherein an exterior angle formed by the first outer support structure and the first oblique support structure is greater than 90 degrees.
5 . The memory device of claim 1 , wherein a sum of an interior angle formed by the first protrusion pattern and the first oblique support structure and an exterior angle formed by the first outer support structure and the first oblique support structure is 180 degrees.
6 . The memory device of claim 1 , wherein the first outer support structure, the first protrusion pattern, the connection support structure, and the first oblique support structure penetrate, toward a substrate, a stack structure located on the substrate.
7 . The memory device of claim 1 , further comprising:
a second outer support structure arranged in parallel to the first outer support structure;
a second protrusion pattern parallel to the first protrusion pattern, the second protrusion pattern being in contact with an end of the second outer support structure; and
a second oblique support structure connecting the connection support structure and the second outer support structure to each other in a second oblique direction to the first and second directions.
8 . The memory device of claim 7 , wherein the connection support structure is located between the first and second protrusion patterns.
9 . The memory device of claim 7 , wherein the first and second oblique support structures are symmetrical to each other with respect to the connection support structure.
10 . A memory device comprising:
a first outer support structure extending in a first direction;
a connection support structure spaced apart from the first outer support structure along a second direction perpendicular to the first direction;
a first oblique support structure connecting the connection support structure and the first outer support structure to each other in a first oblique direction to the first and second directions; and
a first auxiliary support structure located in a region in which the first direction along the first outer support structure and the second direction along the connection support structure extend to intersect with each other, the first auxiliary support structure being spaced apart from the first outer support structure, the connection support structure, and the first oblique support structure.
11 . The memory device of claim 10 , wherein the first outer support structure, the connection support structure, the first oblique support structure, and the first auxiliary support structure penetrate, toward a substrate, a stack structure located on the substrate.
12 . The memory device of claim 10 , wherein the first auxiliary support structure has a quadrangular, circular, or elliptical island shape.
13 . The memory device of claim 10 , further comprising:
a second outer support structure arranged in parallel to the first outer support structure;
a second oblique support structure connecting the connection support structure and the second outer support structure to each other in a second oblique direction to the first and second directions; and
a second auxiliary support structure located in a region in which the first direction along the second outer support structure and the second direction along the connection support structure extend to intersect with each other, the second auxiliary support structure being spaced apart from the second outer support structure, the connection support structure, and the second oblique support structure.
14 . The memory device of claim 13 , wherein the connection support structure is located between the first and second auxiliary support structures.
15 . The memory device of claim 13 , wherein the first and second oblique support structures are symmetrical to each other with respect to the connection support structure.