IP Library › Granted Patent US 12665140
Granted Patent B2
US 12665140 · App. 18/503,812 · Granted Jun 23, 2026

MEMS switch with high off state voltage standoff rating

Inventors: Tamir Eran Moran (Petaluma, CA); Sanchien Hong (Placentia, CA); Peter Maimone (Orange, CA)
Assignee: Menlo Microsystems, Inc.
H01H1/0036H01H9/12H01H59/0009
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Quick Facts
Patent No.
US 12665140
App. No.
18/503,812
Granted
Jun 23, 2026
Kind
B2
Abstract

A microelectromechanical system (MEMS) switch apparatus for handling input voltages higher than a standoff voltage of each MEMS switch in the MEMS switch apparatus may comprise at least one pair of MEMS switches. Each pair of MEMS switches may comprise a first MEMS switch and a second MEMS switch electrically coupled to the first MEMS switch at a midpoint. The first and second MEMS switches may be arranged in a back-to-back configuration. Each pair of MEMS switches may further comprise an input electrically coupled to the first MEMS switch, an output electrically coupled to the second MEMS switch, at least one input component electrically coupled across the first MEMS switch from the input to the midpoint, and at least one output component electrically coupled across the second MEMS switch from the midpoint to the output.

Claims (39)

1 . A microelectromechanical system (MEMS) apparatus for handling an input voltage higher than a standoff voltage of a MEMS switch in the MEMS apparatus, the MEMS apparatus comprising:

at least one pair of MEMS switches, each pair of MEMS switches comprising:

a first MEMS switch;

a second MEMS switch electrically coupled to the first MEMS switch at a midpoint, the first and second MEMS switches being arranged in a back-to-back configuration;

an input electrically coupled to the first MEMS switch;

an output electrically coupled to the second MEMS switch;

at least one input component electrically coupled across the first MEMS switch from the input to the midpoint; and

at least one output component electrically coupled across the second MEMS switch from the midpoint to the output.

2 . The MEMS apparatus of claim 1 , wherein at least one of the at least one input component or the at least one output component comprises a passive component.

3 . The MEMS apparatus of claim 1 , wherein each of the at least one input component and the at least one output component comprises a passive component.

4 . The MEMS apparatus of claim 1 , wherein at least one of the at least one input component or the at least one output component comprises a capacitor.

5 . The MEMS apparatus of claim 1 , wherein each of the at least one input component and the at least one output component comprises a capacitor.

6 . The MEMS apparatus of claim 1 , wherein a first input component capacitance is four times a second input component capacitance, a first output component capacitance is two times a second output component capacitance, the second input component capacitance is equal to the second output component capacitance, a third input component capacitance is two times the second input component capacitance, and a third output component capacitance is four times the second output component capacitance.

7 . The MEMS apparatus of claim 1 , wherein at least one of the at least one input component or the at least one output component comprises a resistor.

8 . The MEMS apparatus of claim 1 , wherein each of the at least one input component and the at least one output component comprises a resistor.

9 . The MEMS apparatus of claim 1 , wherein at least one of the at least one input component or the at least one output component comprises a resistor and a capacitor.

10 . The MEMS apparatus of claim 1 , wherein each of the at least one input component and the at least one output component comprises a resistor and a capacitor.

11 . The MEMS apparatus of claim 1 , wherein each of the at least one pair of MEMS switches is electrically coupled to a mode control switch.

12 . The MEMS apparatus of claim 1 , wherein two or more pairs of MEMS switches are electrically connected in series.

13 . The MEMS apparatus of claim 12 , wherein three pairs of MEMS switches are electrically connected in series.

14 . The MEMS apparatus of claim 1 , wherein at least one of the at least one pair of MEMS switches is electrically coupled to a mode control switch.

15 . The MEMS apparatus of claim 14 , wherein:

in a first configuration, the mode control switch is open and each of the at least one pair of MEMS switches is not electrically coupled to ground; and

in a second configuration, the mode control switch is closed and each of the at least one pair of MEMS switches is electrically coupled to ground.

16 . A method of accommodating an input voltage that is higher than a standoff voltage of a microelectromechanical system (MEMS) apparatus, comprising:

providing the MEMS apparatus comprising at least one pair of MEMS switches, each pair of MEMS switches comprising:

a first MEMS switch;

a second MEMS switch electrically coupled to the first MEMS switch at a midpoint, the first and second MEMS switches being arranged in a back-to-back configuration;

an input electrically coupled to the first MEMS switch;

an output electrically coupled to the second MEMS switch;

at least one input component electrically coupled across the first MEMS switch from the input to the midpoint; and

at least one output component electrically coupled across the second MEMS switch from the midpoint to the output;

distributing the input voltage from an input of a first pair of MEMS switches of the at least one pair of MEMS switches to an output of a last pair of MEMS switches.

17 . The method of claim 16 , further comprising electrically coupling two or more pairs of MEMS switches in series.

18 . The method of claim 16 , further comprising coupling the at least one pair of MEMS switches to a mode control switch.

19 . The method of claim 18 , further comprising implementing (i) a first configuration in which the mode control switch is open and each of the at least one pair of MEMS switches is not electrically coupled to ground, or (ii) a second configuration in which the mode control switch is closed and each of the at least one pair of MEMS switches is electrically coupled to ground.

20 . A microelectromechanical system (MEMS) apparatus for handling an input voltage higher than a standoff voltage of a MEMS switch in the MEMS apparatus, comprising:

two or more MEMS switches electrically connected in series from an apparatus input to an apparatus output;

for each of the two or more MEMS switches, a component attached across the MEMS switch, such that the components associated with the two or more MEMS switches are connected in series from the apparatus input to the apparatus output, and such that the input voltage is distributed across the components.