Light-emitting apparatus and manufacturing method thereof
To provide a light-emitting apparatus capable of shaping light from a plurality of light-emitting elements into light with a plurality of shapes and a manufacturing method thereof. A light-emitting apparatus according to the present disclosure, including: a substrate; a plurality of light-emitting elements which are provided on a side of a first surface of the substrate; and a plurality of first lenses which are provided on a side of a second surface of the substrate and on which light emitted from the plurality of light-emitting elements is incident, wherein the plurality of first lenses include at least two types of lenses among a concave lens, a convex lens, and a flat lens.
1 . A light-emitting apparatus, comprising:
a substrate;
a plurality of light-emitting elements on a side of a first surface of the substrate, wherein each light-emitting element of the plurality of light-emitting elements is configured to emit light; and
a plurality of first lenses on a side of a second surface of the substrate, wherein
the light emitted from the plurality of light-emitting elements is incident on the plurality of first lenses, and
the plurality of first lenses includes a concave lens, a convex lens, and a flat lens.
2 . The light-emitting apparatus according to claim 1 , further comprising a second lens on which the light having passed through the plurality of first lenses is incident.
3 . The light-emitting apparatus according to claim 1 , wherein the plurality of first lenses is on the second surface of the substrate as a part of the substrate.
4 . The light-emitting apparatus according to claim 3 , further comprising an inorganic film on the second surface of the substrate between lenses of the plurality of first lenses.
5 . The light-emitting apparatus according to claim 1 , wherein
the each light-emitting element of the plurality of light-emitting elements corresponds to a respective first lens of the plurality of first lenses, and
the light emitted from the each light-emitting element of the plurality of light-emitting elements is incident on the respective first lens.
6 . The light-emitting apparatus according to claim 1 , further comprising a film on a surface of the concave lens, wherein the film has one of a flat surface or a convex surface on an opposite side to the concave lens.
7 . The light-emitting apparatus according to claim 1 , further comprising a film on a surface of the convex lens, wherein the film has a flat surface on an opposite side to the convex lens.
8 . The light-emitting apparatus according to claim 1 , further comprising an antireflective film on a surface of the plurality of first lenses.
9 . The light-emitting apparatus according to claim 1 , wherein the substrate is a semiconductor substrate containing gallium (Ga) and arsenic (As).
10 . The light-emitting apparatus according to claim 1 , wherein the light emitted from the plurality of light-emitting elements is transmitted inside the substrate from the first surface to the second surface and incident on the plurality of first lenses.
11 . The light-emitting apparatus according to claim 1 , wherein the first surface of the substrate is a front surface of the substrate and the second surface of the substrate is a rear surface of the substrate.
12 . The light-emitting apparatus according to claim 1 , further comprising a drive apparatus on the side of the first surface of the substrate via the plurality of light-emitting elements, wherein the drive apparatus is configured to drive the plurality of light-emitting elements.
13 . The light-emitting apparatus according to claim 12 , wherein the drive apparatus is configured to drive the plurality of light-emitting elements on an individual basis.
14 . A light-emitting apparatus, comprising:
a substrate;
a plurality of light-emitting elements on a side of a first surface of the substrate, wherein each light-emitting element of the plurality of light-emitting elements is configured to emit light; and
a plurality of first lenses on a side of a second surface of the substrate, wherein
the light emitted from the plurality of light-emitting elements is incident on the plurality of first lenses, and
the plurality of first lenses includes a flat lens, a first concave lens, and a second concave lens with a shape that differs from that of the first concave lens.
15 . A manufacturing method of a light-emitting apparatus, the manufacturing method comprising:
forming a plurality of light-emitting elements on a side of a first surface of a substrate; and
forming a plurality of first lenses on a side of a second surface of the substrate, wherein
light emitted from the plurality of light-emitting elements is incident on the plurality of first lenses, and
the plurality of first lenses includes a concave lens, a convex lens, and a flat lens.
16 . The manufacturing method of the light-emitting apparatus according to claim 15 , further comprising arranging a second lens on which the light having passed through the plurality of first lenses is incident.
17 . The manufacturing method of the light-emitting apparatus according to claim 15 , wherein the plurality of first lenses is formed as a part of the substrate by machining the second surface of the substrate.
18 . The manufacturing method of the light-emitting apparatus according to claim 15 , wherein the concave lens is formed by forming a convex portion on the second surface of the substrate and machining the convex portion into a concave portion.
19 . The manufacturing method of the light-emitting apparatus according to claim 18 , wherein the convex portion is formed by forming a resist film on the second surface of the substrate, patterning the resist film, baking the patterned resist film, and transferring a pattern of the baked resist film to the substrate.
20 . The manufacturing method of the light-emitting apparatus according to claim 18 , wherein the concave portion is formed by forming a mask layer on the convex portion, exposing the convex portion from the mask layer by etching the mask layer, and further etching the mask layer together with the convex portion.
21 . The manufacturing method of the light-emitting apparatus according to claim 15 , wherein the convex lens is formed by forming a convex portion on the second surface of the substrate.
22 . The manufacturing method of the light-emitting apparatus according to claim 21 , wherein the convex portion is formed by forming a resist film on the second surface of the substrate, patterning the resist film, baking the patterned resist film, and transferring a pattern of the baked resist film to the substrate.
23 . The manufacturing method of the light-emitting apparatus according to claim 15 , wherein the concave lens and the convex lens are formed by forming a film including a concave portion and a convex portion on the substrate and transferring the concave portion and the convex portion to the substrate.
24 . A manufacturing method of a light-emitting apparatus, the manufacturing method comprising:
forming a plurality of light-emitting elements on a side of a first surface of a substrate; and
forming a plurality of first lenses on a side of a second surface of the substrate, wherein
light emitted from the plurality of light-emitting elements is incident on the plurality of first lenses, and
the plurality of first lenses includes a flat lens, a first concave lens, and a second concave lens with a shape that differs from that of the first concave lens.