Stacked transistor backside contact formation
A semiconductor IC structure includes a dielectric contact liner between an upper S/D region backside contact and a lower S/D region. As a result of the dielectric contact liner, the overlap between the upper transistor and the lower transistor may be increased, which may lead to further device scaling. To achieve these benefits, material that later forms the dielectric contact liner is deposited within an associated upper S/D region backside contact opening and has etch selectivity that may result in a later self-aligned reformation of the backside contact opening with reduced risk of that opening extending into the neighboring lower S/D region. The ability to self-align the formation of the backside contact opening may allow for the placement of such opening to be relatively closer to lower S/D region. The dielectric contact liner material may remain between and adequately electrically isolate the backside contact and the lower S/D region.
1 . A semiconductor integrated circuit (IC) device comprising:
an upper transistor comprising upper source/drain (S/D) region that is connected to a backside contact;
a lower transistor comprising a lower S/D region with a recessed sidewall; and
a dielectric contact liner in direct contact with the recessed sidewall of the lower S/D region and with a sidewall of the backside contact.
2 . The semiconductor IC device of claim 1 , wherein the backside contact is further electrically connected to a backside back end of line (BEOL) network.
3 . The semiconductor IC device of claim 1 , further comprising:
a bonding layer between the upper transistor and the lower transistor.
4 . The semiconductor IC device of claim 1 , wherein the lower S/D region is inset with respect to the upper S/D region.
5 . The semiconductor IC device of claim 1 , wherein the recessed sidewall of the lower S/D region is substantially vertical.
6 . The semiconductor IC device of claim 1 , wherein the recessed sidewall of the lower S/D region is substantially parallel with the sidewall of the backside contact.
7 . The semiconductor IC device of claim 1 , wherein the lower S/D region further comprises one or more (111) crystallographic side surfaces that face away from the backside contact.
8 . The semiconductor IC device of claim 1 , wherein the lower transistor further comprises a lower interlayer dielectric (ILD) around the lower S/D region.
9 . The semiconductor IC device of claim 8 , wherein the dielectric contact liner is composed of a first material and the lower ILD is composed of a second material and wherein the first material has etch selectivity relative to the second material.
10 . The semiconductor IC device of claim 3 , wherein the backside contact comprises an upper portion and a lower portion and wherein the upper portion has a larger perimeter relative to a perimeter of the lower portion.
11 . The semiconductor IC device of claim 3 , wherein respective upper and lower surfaces of the upper portion are coplanar with respective upper and lower surfaces of the bonding layer.
12 . The semiconductor IC device of claim 1 , wherein the lower S/D region is electrically connected to a frontside BEOL network by a frontside contact.
13 . A semiconductor integrated circuit (IC) device comprising:
an upper transistor comprising upper source/drain (S/D) region that is connected to a first backside contact;
a lower transistor comprising a lower S/D region that has a recessed sidewall and is connected to a second backside contact; and
a dielectric contact liner in direct contact with the recessed sidewall of the lower S/D region and with a sidewall of the first backside contact, wherein at least a portion of the upper S/D region overlaps the lower S/D region there below.
14 . The semiconductor IC device of claim 13 , wherein both the first backside contact and the second backside contact are further connected to a backside back end of line (BEOL) network.
15 . The semiconductor IC device of claim 13 , further comprising:
a bonding layer between the upper transistor and the lower transistor.
16 . The semiconductor IC device of claim 13 , wherein the recessed sidewall of the lower S/D region is substantially vertical.
17 . The semiconductor IC device of claim 13 , wherein the recessed sidewall of the lower S/D region is substantially parallel with the sidewall of the first backside contact.
18 . The semiconductor IC device of claim 13 , wherein the lower S/D region further comprises one or more (111) crystallographic side surfaces that face away from the first backside contact.
19 . The semiconductor IC device of claim 13 , wherein the lower transistor further comprises a lower interlayer dielectric (ILD) around the lower S/D region, wherein the dielectric contact liner is composed of a first material and the lower ILD is composed of a second material, and wherein the first material has etch selectivity relative to the second material.
20 . A method of fabricating a semiconductor integrated circuit (IC) device comprising:
forming a lower source/drain (S/D) region of a lower transistor;
depositing an interlayer dielectric (ILD) composed of a first dielectric material around the lower S/D region;
forming an upper S/D region backside contact opening within the ILD, wherein the upper S/D region backside contact opening exposes a side portion of the lower S/D region;
recessing the side portion of the lower S/D region;
forming an upper S/D region backside contact placeholder within the upper S/D region backside contact opening against the recessed side portion of the lower S/D region.