Display apparatus with multilayered conductive layer
A display apparatus includes a substrate, a semiconductor layer disposed on the substrate, where the semiconductor layer includes a source region and a drain region, a gate insulating layer disposed on the semiconductor layer, a first conductive layer disposed on the gate insulating layer, an interlayer insulating layer disposed on the first conductive layer, a second conductive layer including a first layer including a first metal and disposed on the interlayer insulating layer, a second layer including a second metal and disposed on the first layer, and a third layer including the first metal and disposed on the second layer, a first organic insulating layer disposed on the second conductive layer, and a third conductive layer disposed on the first organic insulating layer, where the third conductive layer has an area smaller than an area of the second conductive layer.
1 . A display apparatus comprising:
a substrate;
a semiconductor layer disposed on the substrate, wherein the semiconductor layer comprises a source region and a drain region;
a gate insulating layer disposed on the semiconductor layer;
a first conductive layer disposed on the gate insulating layer;
an interlayer insulating layer disposed on the first conductive layer;
a second conductive layer comprising:
a first layer comprising a first metal and disposed on the interlayer insulating layer;
a second layer comprising a second metal and disposed on the first layer; and
a third layer comprising the first metal and disposed on the second layer;
a first organic insulating layer disposed on the second conductive layer;
a third conductive layer disposed on the first organic insulating layer, wherein the third conductive layer has an area smaller than an area of the second conductive layer;
a first pad disposed on the substrate;
a second pad disposed on the first pad; and
a third pad disposed on the second pad,
wherein the interlayer insulating layer is disposed between the first pad and the second pad, and the second pad is connected to the first pad through a through hole defined in the interlayer insulating layer.
2 . The display apparatus of claim 1 , wherein
the first layer has a first thickness,
the second layer has a second thickness,
the third layer has a third thickness, and
the third thickness is about 500 Å or greater and about 700 Å or less.
3 . The display apparatus of claim 2 , wherein the third thickness is less than or equal to the first thickness.
4 . The display apparatus of claim 1 , wherein
the first metal comprises titanium (Ti), and
the second metal comprises aluminum (Al).
5 . The display apparatus of claim 1 , wherein the first organic insulating layer includes a material which is formed at a temperature of about 250 degrees Celsius or greater and 300 degrees Celsius or less.
6 . The display apparatus of claim 1 , further comprising:
a second organic insulating layer disposed on the third conductive layer;
a pixel electrode disposed on the second organic insulating layer and connected to the third conductive layer through a through hole defined in the second organic insulating layer;
a pixel-defining layer disposed on the second organic insulating layer and covering an edge of the pixel electrode; and
a spacer disposed on the pixel-defining layer.
7 . The display apparatus of claim 6 , wherein the third conductive layer comprises:
a fourth layer comprising the first metal and disposed on the first organic insulating layer;
a fifth layer comprising the second metal and disposed on the fourth layer; and
a sixth layer comprising the first metal and disposed on the fifth layer.
8 . The display apparatus of claim 7 , wherein
the fourth layer has a seventh thickness,
the fifth layer has an eighth thickness,
the sixth layer has a ninth thickness, and
the ninth thickness is about 500 Å or greater and about 700 Å or less.
9 . The display apparatus of claim 8 , wherein the ninth thickness is less than or equal to the seventh thickness.
10 . The display apparatus of claim 7 , wherein
the first metal comprises titanium (Ti), and
the second metal comprises aluminum (Al).
11 . The display apparatus of claim 7 , wherein the second organic insulating layer comprises a material which is formed at a temperature of about 250 degrees Celsius or greater and about 300 degrees Celsius or less.
12 . The display apparatus of claim 1 , wherein the second pad comprises:
a first pad layer comprising the first metal;
a second pad layer comprising the second metal and disposed on the first pad layer; and
a third pad layer comprising the first metal and disposed on the second pad layer.
13 . The display apparatus of claim 12 , wherein
the first pad layer has a fourth thickness,
the second pad layer has a fifth thickness,
the third pad layer has a sixth thickness, and
the sixth thickness is about 500 Å or greater and about 700 Å or less.
14 . The display apparatus of claim 13 , wherein the sixth thickness is less than or equal to the fourth thickness.
15 . The display apparatus of claim 12 , wherein
the first metal comprises titanium (Ti), and
the second metal comprises aluminum (Al).
16 . The display apparatus of claim 1 , wherein
the first pad comprises a same material as the first conductive layer and has a same layer structure as the first conductive layer, and
the second pad comprises a same material as the second conductive layer and has a same layer structure as the second conductive layer.
17 . The display apparatus of claim 1 , wherein the third pad covers an entire portion of a top surface of the second pad.
18 . The display apparatus of claim 17 , wherein the top surface of the second pad is in direct contact with the third pad.