Mounting apparatus, mounting method, and recording medium
A mounting apparatus obtains calibration values for calibrating a difference between coordinate values based on top-view and bottom-view images, for each assumed placement height of a planned placement area of a mounting body. A calibration controller calculates calibration values based on the top-view and bottom-view images from a bottom-view imaging unit and top-view imaging units employing a Scheimpflug optical system by imaging a calibration index matching the placement height. A mounting controller adjusts a position of a mounting tool so that a planned contact surface of the mounting body is at the placement height to recognize a reference position based on the bottom-view image, and adjusts positions of the top-view imaging units so that the focal plane falls on the same plane as the placement height to recognize a target position based on the top-view images of the planned placement area and the calibration values corresponding to the placement height.
1 . A mounting apparatus, comprising:
a mounting tool picking up and holding a mounting body, and placing and mounting the mounting body on a substrate placed on a stage or a planned placement area set for another mounting body already mounted on the substrate;
top-view imaging units, in which optical systems and imaging elements are arranged to satisfy a Scheimpflug condition so that a plane parallel to a stage surface of the stage becomes a focal plane, for imaging from above the planned placement area from a first side as the mounting tool with respect to the stage surface;
a bottom-view imaging unit for imaging from below the mounting body that is in a state of being held by the mounting tool from a second side opposite to the first side of the top-view imaging units with respect to the stage surface;
a calibration controller calculating calibration values for calibrating a difference between coordinate values calculated based on top-view images output by the top-view imaging units and coordinate values calculated based on a bottom-view image output by the bottom-view imaging unit; and
a mounting controller placing and mounting the mounting body on the planned placement area so that a reference position of the mounting body held by the mounting tool coincides with a target position of the planned placement area,
wherein the calibration controller calculates the calibration values for assumed placement heights of the planned placement area based on the top-view images and the bottom-view image output by the top-view imaging units and the bottom-view imaging unit by imaging a calibration index arranged to match each of the assumed placement heights, and the mounting controller adjusts a position of the mounting tool so that a planned contact surface of the mounting body for contacting the planned placement area is at each of the assumed placement heights to recognize the reference position based on the bottom-view image output by the bottom-view imaging unit by imaging the planned contact surface, and adjusts positions of the top-view imaging units so that the focal plane falls on the same plane as each of the assumed placement heights to recognize the target position based on the top-view images obtained by the top-view imaging units by imaging the planned placement area and the calibration values corresponding to the placement height;
wherein the calibration controller calculates and updates the calibration values for each of the assumed placement heights based on a preset lot, a working time of a mounting work or a preset temperature.
2 . The mounting apparatus according to claim 1 , comprising an adjusting mechanism that adjusts the calibration index to the corresponding placement height according to the calibration values to be calculated.
3 . The mounting apparatus according to claim 1 , wherein a plurality of the calibration indices are provided according to the assumed placement height.
4 . The mounting apparatus according to claim 1 , wherein the calibration controller calculates and updates the calibration values for each of the assumed placement heights each time the mounting controller completes mounting of the mounting bodies for the preset lot.
5 . The mounting apparatus according to claim 1 , wherein the calibration controller calculates and updates the calibration values for each of the assumed placement heights based on the working time of the mounting work is executed by the mounting controller.
6 . The mounting apparatus according to claim 1 , comprising a temperature detector that detects a temperature of the top-view imaging units, wherein the calibration controller calculates and updates the calibration values for each of the assumed placement heights when the temperature detector detects the preset temperature.
7 . The mounting apparatus according to claim 1 , wherein the calibration controller causes the top-view imaging units and the bottom-view imaging unit to image the calibration index in synchronization with a process that the mounting controller causes the bottom-view imaging unit to image the planned contact surface of the mounting body, and calculates the calibration values corresponding to each of the assumed placement heights of the mounting body.
8 . The mounting apparatus according to claim 1 , wherein the top-view imaging units comprise a first imaging unit and a second imaging unit that are adjusted so that focal planes of the first imaging unit and the second imaging unit coincide, and the mounting controller corrects a provisional target position calculated based on a first top-view image output by the first imaging unit by imaging the planned placement area and a second top-view image output by the second imaging unit by imaging the planned placement area by the calibration values to recognize the target position.
9 . A non-transient computer-readable recording medium, recording a mounting control program for controlling a mounting apparatus, which comprises a mounting tool picking up and holding a mounting body and placing and mounting the mounting body on a substrate placed on a stage or a planned placement area set for another mounting body already mounted on the substrate;
top-view imaging units in which respective optical systems and imaging elements are arranged to satisfy a Scheimpflug condition so that a plane parallel to a stage surface of the stage becomes a focal plane, for imaging from above the planned placement area from a first side as the mounting tool with respect to the stage surface; and
a bottom-view imaging unit for imaging from below the mounting body that is in a state of being held by the mounting tool from a second side opposite to the first side of the top-view imaging units with respect to the stage surface, the mounting control program causing a computer to execute:
a calibration control step of calculating calibration values for calibrating a difference between coordinate values calculated based on top-view images output by the top-view imaging units and coordinate values calculated based on a bottom-view image output by the bottom-view imaging unit by a calibration controller; and
a mounting control step of placing and mounting the mounting body on the planned placement area so that a reference position of the mounting body held by the mounting tool coincides with a target position of the planned placement area by a mounting controller,
wherein the calibration control step calculates the calibration values for assumed placement heights of the planned placement area based on the top-view images and the bottom-view image output by the top-view imaging units and the bottom-view imaging unit by imaging a calibration index arranged to match each of the assumed placement heights, and the mounting control step adjusts a position of the mounting tool so that a planned contact surface of the mounting body for contacting the planned placement area is at each of the assumed placement heights to recognize the reference position based on the bottom-view image output by the bottom-view imaging unit by imaging the planned contact surface, and adjusts positions of the top-view imaging units so that the focal plane falls on the same plane as each of the assumed placement heights to recognize the target position based on the top-view images obtained by the top-view imaging units by imaging the planned placement area and the calibration values corresponding to the placement height;
wherein the calibration controller calculates and updates the calibration values for each of the assumed placement heights based on a preset lot, a working time of a mounting work or a preset temperature.
10 . A mounting method for a mounting body using a mounting apparatus, which comprises a mounting tool picking up and holding the mounting body and placing and mounting the mounting body on a substrate placed on a stage or a planned placement area set for another mounting body already mounted on the substrate;
top-view imaging units in which respective optical systems and imaging elements are arranged to satisfy a Scheimpflug condition so that a plane parallel to a stage surface of the stage becomes a focal plane, for imaging from above the planned placement area from a first side as the mounting tool with respect to the stage surface; and a bottom-view imaging unit for imaging from below the mounting body that is in a state of being held by the mounting tool from a second side opposite to the first side of the top-view imaging units with respect to the stage surface, the mounting method comprising:
a calibration control step of calculating calibration values for calibrating a difference between coordinate values calculated based on top-view images output by the top-view imaging units and coordinate values calculated based on a bottom-view image output by the bottom-view imaging unit by a calibration controller; and
a mounting control step of placing and mounting the mounting body on the planned placement area so that a reference position of the mounting body held by the mounting tool coincides with a target position of the planned placement area by a mounting controller,
wherein the calibration control step calculates the calibration values for assumed placement heights of the planned placement area based on the top-view images and the bottom-view image output by the top-view imaging units and the bottom-view imaging unit by imaging a calibration index arranged to match each of the assumed placement heights, and
the mounting control step adjusts a position of the mounting tool so that a planned contact surface of the mounting body for contacting the planned placement area is at each of the assumed placement heights to recognize the reference position based on the bottom-view image output by the bottom-view imaging unit by imaging the planned contact surface, and adjusts positions of the top-view imaging units so that the focal plane falls on the same plane as each of the assumed placement heights to recognize the target position based on the top-view images obtained by the top-view imaging units by imaging the planned placement area and the calibration values corresponding to the placement height;
wherein the calibration controller calculates and updates the calibration values for each of the assumed placement heights based on a preset lot, a working time of a mounting work or a preset temperature.