Teaching substrate for production and process-control tools
A substrate is to be loaded into an equipment front-end module of a fabrication or inspection tool. A first camera is situated on the substrate to image regions to a side of the substrate. A second camera is situated on the substrate to image regions below the substrate. One or more wireless transceivers on the substrate to transmit images captured by the first and second cameras.
1 . An apparatus, comprising:
a substrate to be loaded into an equipment front-end module of a fabrication or inspection tool;
a first camera positioned on the substrate to image regions to a side of the substrate;
a second camera positioned on the substrate to image regions below the center of the substrate;
a third camera positioned on the substrate to image regions below an edge of the substrate; and
one or more wireless transceivers on the substrate to transmit images captured by the first, second, and third cameras.
2 . The apparatus of claim 1 , further comprising a fourth camera positioned on the substrate to image regions below the first camera.
3 . The apparatus of claim 2 , wherein the third camera and the fourth camera face sideways with respect to the substrate, the apparatus further comprising:
a first mirror to direct a view of the third camera to the regions below the edge of the substrate; and
a second mirror to direct a view of the fourth camera to the regions below the first camera.
4 . The apparatus of claim 1 , wherein:
the fabrication or inspection tool is a tool for fabricating or inspecting semiconductor wafers;
the substrate is wafer-shaped;
the first camera, second camera, and third camera are positioned along a diameter of the substrate; and
the third camera and the first camera are on opposite sides of the second camera along the diameter.
5 . The apparatus of claim 1 , wherein:
the first camera, second camera, and third camera are on top of the substrate;
the first camera faces sideways with respect to the substrate;
the second and third cameras face downward with respect to the substrate; and
the substrate is transparent.
6 . The apparatus of claim 1 , wherein:
the first camera, second camera, and third camera are on top of the substrate;
the first camera faces sideways with respect to the substrate;
the second camera faces sideways with respect to the substrate; and
the apparatus further comprises a mirror to direct a view of the second camera to the regions below the center of the substrate.
7 . The apparatus of claim 1 , wherein:
the first camera, second camera, and third camera are on top of the substrate;
the first camera faces sideways with respect to the substrate;
the second and third cameras face downward with respect to the substrate; and
the substrate has a first hole to provide the second camera with a view of the regions below the center of the substrate and a second hole to provide the third camera with a view of the regions below the edge of the substrate.
8 . The apparatus of claim 1 , further comprising lighting for the first camera, second camera, and third camera.
9 . The apparatus of claim 8 , wherein the lighting comprises a first light-guide panel, facing downward with respect to the substrate, to illuminate the regions below the center of the substrate for imaging by the second camera and the regions below the edge of the substrate for imaging by the third camera.
10 . The apparatus of claim 9 , wherein the lighting further comprises a second light-guide panel, facing sideways with respect to the substrate, to illuminate the regions to the side of the substrate for imaging by the first camera.
11 . The apparatus of claim 8 , wherein the lighting comprises:
a first plurality of light-emitting diodes (LEDs), facing downward with respect to the substrate, to illuminate the regions below the center of the substrate for imaging by the second camera and the regions below the edge of the substrate for imaging by the third camera; and
a second plurality of LEDs, facing sideways with respect to the substrate, to illuminate the regions to the side of the substrate for imaging by the first camera.
12 . An apparatus comprising:
a substrate to be loaded into an equipment front-end module of a fabrication or inspection tool;
a first camera positioned on the substrate to image regions to a side of the substrate;
a second camera positioned on the substrate to image regions below the substrate; and
a distance-measuring sensor positioned on the substrate facing downward with respect to the substrate to measure a distance to a surface below the substrate; and
one or more wireless transceivers on the substrate to transmit images captured by the first and second cameras and data from the distance-measuring sensor, the data from the distance-measuring sensor comprising the distance.
13 . The apparatus of claim 12 , wherein the distance-measuring sensor comprises a triangulator.
14 . The apparatus of claim 13 , wherein the triangulator comprises:
a pair of collimated-light sources to produce collimated beams;
a lens to focus the collimated beams;
a mirror to fold the collimated beams and reflections of the collimated beams;
a pair of segmented photodiodes to receive the reflections of the collimated beams; and
a pair of beam splitters to provide the collimated beams to the lens and to provide the reflections of the collimated beams to the pair of segmented photodiodes, wherein the lens is to direct the reflections of the collimated beams to the pair of beam splitters.
15 . The apparatus of claim 13 , wherein the triangulator comprises:
a collimated light source to produce a collimated beam;
a folding mirror to direct the collimated beam downward through the teaching substrate at an oblique angle; and
an imager to detect a location at which the collimated beam, as directed downward at the oblique angle by the folding mirror, is incident on the surface.
16 . An apparatus comprising:
a substrate to be loaded into an equipment front-end module of a fabrication or inspection tool;
a first camera positioned on the substrate to image regions to a side of the substrate;
a second camera positioned on the substrate to image regions below the substrate;
a distance-measuring sensor positioned on the substrate facing sideways with respect to the substrate to measure a distance to a surface beside the substrate; and
one or more wireless transceivers on the substrate to transmit images captured by the first and second cameras and data from the distance-measuring sensor, the data from the distance-measuring sensor comprising the distance.
17 . The apparatus of claim 1 , further comprising an accelerometer on the substrate, wherein the one or more wireless transceivers are to transmit data from the accelerometer, the data comprising acceleration measurements from the accelerometer.
18 . The apparatus of claim 1 , wherein the substrate is reticle-shaped.
19 . The apparatus of claim 1 , wherein the one or more wireless transceivers comprise a wireless local-area-network (WLAN) transceiver.
20 . The apparatus of claim 1 , wherein the one or more wireless transceivers comprise a personal-area-network (PAN) transceiver.