IP Library Granted Patent US 12666949
Granted Patent B2
US 12666949 · App. 18/341,329 · Granted Jun 23, 2026

Circuit cells having power stubs

Inventors: Yi-Yi Chen (Hsinchu, TW); Li-Chun Tien (Hsinchu, TW); Chih-Liang Chen (Hsinchu, TW); Wei-Cheng Lin (Hsinchu, TW); Jiann-Tyng Tzeng (Hsinchu, TW); Chi-Yu Lu (Hsinchu, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
H10W20/427H10D64/251H10D84/0186H10D84/0188H10D84/038H10D84/85H10W20/42
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Quick Facts
Patent No.
US 12666949
App. No.
18/341,329
Filed
Jun 26, 2023
Granted
Jun 23, 2026
Kind
B2
Art Unit
2898
USPC
257/773
Abstract

An integrated circuit includes a first-type active-region structure and a second-type active-region structure extending in a first direction and a first terminal-conductor and a second terminal-conductor extending in a second direction. The integrated circuit also includes a first power stub and a second power stub in a first metal layer and a first power line and a second power line in a second metal layer. The integrated circuit further includes a first via connector directly connected between the first power stub and the first terminal-conductor, a second via connector directly connected between the second power stub and the second terminal-conductor, a third via connector directly connected between the first power stub and the first power line, and a fourth via connector directly connected between the second power stub and the second power line.

Claims (56)

1 . An integrated circuit comprising:

a first-type active-region structure and a second-type active-region structure extending in a first direction;

a first isolation region and a second isolation region in the first-type active-region structure;

a third isolation region and a fourth isolation region in the second-type active-region structure, wherein the third isolation region in the second-type active-region structure and the first isolation region in the first-type active-region structure are aligned vertically along a second direction and delineates a first vertical cell boundary of a circuit cell, and wherein the fourth isolation region in the second-type active-region structure and the second isolation region in the first-type active-region structure are aligned vertically along the second direction and delineates a second vertical cell boundary of the circuit cell;

a first power stub and a second power stub in a first metal layer overlying a first interlayer dielectric that covers the first-type active-region structure and the second-type active-region structure, wherein each of the first power stub and the second power stub is bounded between the first vertical cell boundary and the second vertical cell boundary;

a first via connector directly connected between the first power stub and a first source terminal of a first transistor in the circuit cell;

a second via connector directly connected between the second power stub and a second source terminal of a second transistor in the circuit cell; and

a first power line and a second power line in a second metal layer overlying a second interlayer dielectric that covers the first power stub and the second power stub in the first metal layer, wherein the first power line is connected to the first power stub and the second power line is connected to the second power stub, and wherein the first power line is configured to receive a first power supply voltage and the second power line is configured to receive a second power supply voltage that is different from the first power supply voltage.

2 . The integrated circuit of claim 1 , further comprising:

a first terminal-conductor extending in the second direction and intersecting the first-type active-region structure at a first source region which is between the first isolation region and the second isolation region, wherein the first terminal-conductor is the first source terminal of the first transistor; and

a second terminal-conductor extending in the second direction and intersecting the second-type active-region structure at a second source region which is between the third isolation region and the fourth isolation region, wherein the second terminal-conductor is the second source terminal of the second transistor.

3 . The integrated circuit of claim 2 , further comprising:

a third via connector directly connected between the first power stub and the first power line; and

a fourth via connector directly connected between the second power stub and the second power line.

4 . The integrated circuit of claim 1 , wherein each of the first power line and the second power line extends in the second direction.

5 . The integrated circuit of claim 4 , wherein each of the first power stub and the second power stub extends in the first direction while bounded between the first vertical cell boundary and the second vertical cell boundary.

6 . The integrated circuit of claim 4 , further comprising:

a horizontal conducting line extending in the first direction in the first metal layer and aligned with a horizontal routing track, wherein either the first power stub or the second power stub is aligned with the horizontal routing track that positions the horizontal conducting line.

7 . The integrated circuit of claim 4 , further comprising:

a vertical conducting line extending in the second direction in the second metal layer and aligned with a vertical routing track, wherein either the first power line or the second power line is aligned with the vertical routing track that positions the vertical conducting line.

8 . The integrated circuit of claim 1 , wherein each of the first power stub and the second power stub extends in the second direction, and wherein each of the first power line and the second power line extends in the first direction.

9 . The integrated circuit of claim 8 , further comprising:

a vertical conducting line extending in the second direction in the second metal layer and aligned with a vertical routing track, wherein either the first power stub or the second power stub is aligned with the vertical routing track that positions the vertical conducting line.

10 . The integrated circuit of claim 8 , wherein each of the first power line and the second power line is bounded between the first vertical cell boundary and the second vertical cell boundary.

11 . The integrated circuit of claim 8 , wherein at least one of the first power line or the second power line crosses both the first vertical cell boundary and the second vertical cell boundary.

12 . An integrated circuit comprising:

a first-type active-region structure and a second-type active-region structure extending in a first direction;

a first isolation region and a second isolation region in the first-type active-region structure;

a third isolation region and a fourth isolation region in the second-type active-region structure, wherein the third isolation region in the second-type active-region structure and the first isolation region in the first-type active-region structure are aligned vertically along a second direction and delineates a first vertical cell boundary of a circuit cell, and wherein the fourth isolation region in the second-type active-region structure and the second isolation region in the first-type active-region structure are aligned vertically along the second direction and delineates a second vertical cell boundary of the circuit cell; and

a first power stub and a second power stub in a first metal layer overlying a first interlayer dielectric that covers the first-type active-region structure and the second-type active-region structure, wherein each of the first power stub and the second power stub is bounded between the first vertical cell boundary and the second vertical cell boundary while extending in the first direction, and wherein the first power stub is configured to receive a first power supply voltage and the second power stub is configured to receive a second power supply voltage that is different from the first power supply voltage.

13 . The integrated circuit of claim 12 , further comprising:

a first via connector directly connected between the first power stub and a first source terminal of a first transistor in the circuit cell;

a second via connector directly connected between the second power stub and a second source terminal of a second transistor in the circuit cell; and

a first power line and a second power line in a second metal layer overlying a second interlayer dielectric that covers the first power stub and the second power stub in the first metal layer, wherein the first power line is connected to the first power stub and the second power line is connected to the second power stub, and wherein each of the first power line and the second power line extends in the second direction.

14 . The integrated circuit of claim 13 , further comprising:

a first terminal-conductor extending in the second direction and intersecting the first-type active-region structure at a first source region which is between the first isolation region and the second isolation region, where the second direction is perpendicular to the first direction, wherein the first terminal-conductor is the first source terminal of the first transistor; and

a second terminal-conductor extending in the second direction and intersecting the second-type active-region structure at a second source region which is between the third isolation region and the fourth isolation region, wherein the second terminal-conductor is the second source terminal of the second transistor.

15 . The integrated circuit of claim 14 , further comprising:

a third via connector directly connected between the first power stub and the first power line; and

a fourth via connector directly connected between the second power stub and the second power line.

16 . The integrated circuit of claim 12 , further comprising:

a horizontal conducting line extending in the first direction in the first metal layer and aligned with a horizontal routing track, wherein either the first power stub or the second power stub is aligned with the horizontal routing track that positions the horizontal conducting line.

17 . The integrated circuit of claim 13 , further comprising:

a vertical conducting line extending in the second direction in the second metal layer and aligned with a vertical routing track, wherein either the first power line or the second power line is aligned with the vertical routing track that positions the vertical conducting line.

18 . An integrated circuit comprising:

a first-type active-region structure and a second-type active-region structure extending in a first direction;

a first isolation region and a second isolation region in the first-type active-region structure;

a third isolation region and a fourth isolation region in the second-type active-region structure, wherein the third isolation region in the second-type active-region structure and the first isolation region in the first-type active-region structure are aligned vertically along a second direction and delineates a first vertical cell boundary of a circuit cell, and wherein the fourth isolation region in the second-type active-region structure and the second isolation region in the first-type active-region structure are aligned vertically along the second direction and delineates a second vertical cell boundary of the circuit cell;

a first power stub and a second power stub in a first metal layer overlying a first interlayer dielectric that covers the first-type active-region structure and the second-type active-region structure, wherein each of the first power stub and the second power stub is bounded between the first vertical cell boundary and the second vertical cell boundary while extending in the first direction;

a first via connector directly connected between the first power stub and a first source terminal of a first transistor in the circuit cell; and

a second via connector directly connected between the second power stub and a second source terminal of a second transistor in the circuit cell.

19 . The integrated circuit of claim 18 , further comprising:

a first power line and a second power line in a second metal layer overlying a second interlayer dielectric that covers the first power stub and the second power stub in the first metal layer, wherein the first power line is connected to the first power stub and the second power line is connected to the second power stub, wherein each of the first power line and the second power line extends in the second direction, and wherein the first power line is configured to receive a first power supply voltage and the second power line is configured to receive a second power supply voltage that is different from the first power supply voltage.

20 . The integrated circuit of claim 18 , further comprising:

a first terminal-conductor extending in the second direction and intersecting the first-type active-region structure at a first source region which is between the first isolation region and the second isolation region, wherein the first terminal-conductor is the first source terminal of the first transistor; and

a second terminal-conductor extending in the second direction and intersecting the second-type active-region structure at a second source region which is between the third isolation region and the fourth isolation region, wherein the second terminal-conductor is the second source terminal of the second transistor.