Functionalized organotin precursors and related methods
Precursors useful in the formation of tin-containing films are provided. The precursors comprise a functionalized tin compound in which one or more ligands are coordinated to Sn, and the Sn is functionalized with at least one functional group. Methods for forming the precursors and methods for forming tin-containing films using the precursors are further provided.
1 . A composition comprising:
a precursor of the formula:
where:
R is (CH 2 ) n —Si(CH 3 ) 3 with n=0 to 3; and
L 1 , L 2 , and L 3 are each independently an amide, an acetylide, a carbamate, or a carboxylate.
2 . The composition of claim 1 , wherein the precursor has a purity of at least 99%.
3 . The composition of claim 1 , wherein R is —Si(CH 3 ) 3 .
4 . The composition of claim 1 , wherein L 1 , L 2 and L 3 are each independently at least one of the following:
where:
R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , R 9 , and R 10 are each independently an alkyl, an alkenyl, an alkynyl, a cycloalkyl, an aryl, a silyl, a silylalkyl, an aminoalkyl, an alkoxyalkyl, or an aralkyl.