Adhesive composition and method of manufacturing a semiconductor device using the same
An adhesive composition comprising a binder resin and a photoinitiator. The binder resin includes a linear or a partially crosslinked copolymer having a plurality of repeating units derived from different acrylate monomers. The copolymer includes a repeating unit having a photoreactive functional group at a side chain and a repeating unit having a siloxane-based functional group at a side chain. The repeating unit has a siloxane-based functional group in a range of about 2% to about 5% of a total weight of the copolymer.
1 . An adhesive composition comprising:
a binder resin and a photoinitiator;
wherein the binder resin includes a linear or a partially crosslinked copolymer having a plurality of repeating units derived from different acrylate monomers,
wherein the copolymer includes a repeating unit having a photoreactive functional group at a side chain and a repeating unit having a siloxane-based functional group at a side chain, and
wherein the repeating unit having a siloxane-based functional group is in a range of about 2% to about 5% of a total weight of the copolymer.
2 . The adhesive composition of claim 1 , wherein the copolymer includes:
a first repeating unit derived from a first acrylate monomer;
a second repeating unit derived from a second acrylate monomer having a reactive functional group, the second repeating unit forming a three-dimensional cross-linked structure or having the photoreactive functional group at the side chain; and
a third repeating unit derived from a third acrylate monomer having the siloxane-based functional group and an acrylate functional group at an end.
3 . The adhesive composition of claim 2 , wherein:
the second repeating unit having the photoreactive functional group at the side chain is in a range of about 70 mol % to 90 mol % of the second repeating unit; and
at least a portion of the second repeating unit excluding the second repeating unit having the photoreactive functional group forms the three-dimensional cross-linked structure.
4 . The adhesive composition of claim 3 , wherein the reactive functional group of the second repeating unit is a hydroxy group.
5 . The adhesive composition of claim 3 , wherein the three-dimensional cross-linked structure is derived from a thermosetting crosslinking agent reacting with the reactive functional group of the second repeating unit.
6 . The adhesive composition of claim 3 , wherein:
the photoreactive functional group is derived from a photocurable compound; and
the photocurable compound includes the photoreactive functional group and a functional group performing an addition reaction with the reactive functional group of the second acrylate monomer that the second repeating unit is derived therefrom.
7 . The adhesive composition of claim 6 , wherein:
the functional group of the photocurable compound is an isocyanate group; and
the photoreactive functional group of the photocurable compound is a functional group containing a carbon-carbon double bond.
8 . The adhesive composition of claim 2 , wherein a weight average molecular weight of the third acrylate monomer that the third repeating unit is derived therefrom is in a range of about 5000 g/mol to about 10000 g/mol.
9 . The adhesive composition of claim 2 , wherein the first repeating unit and the second repeating unit are in a range of about 90% to about 95% of a total weight of the binder resin.
10 . The adhesive composition of claim 1 , wherein the siloxane-based functional group is any one of the functional groups represented by the following Formula 1a, Formula 1b and Formula 1c,
wherein, each of R1 to R4 is a hydrogen atom or an alkyl group having 1 to 10 carbon atoms, and
each of n1 to n3 is an integer between 1 to 200.
11 . An adhesive composition comprising:
a binder resin including a linear or partially crosslinked copolymer, the copolymer having a plurality of repeating units derived from different acrylate monomers and at least one repeating unit derived from an acrylic acid monomer,
wherein the copolymer includes a repeating unit having a photoreactive functional group at a side chain and a repeating unit having a siloxane-based functional group at a side chain, and
wherein the repeating unit having the siloxane-based functional group is in a range of about 2% to about 5% of a total weight of the copolymer.
12 . The adhesive composition of claim 11 , wherein the copolymer includes:
a first repeating unit derived from a first acrylate monomer;
a second repeating unit derived from a second acrylate monomer having a reactive functional group, the second repeating unit forming a three-dimensional cross-linked structure or having the photoreactive functional group at the side chain;
a third repeating unit derived from the acrylic acid monomer; and
a fourth repeating unit derived from a third acrylate monomer having the siloxane-based functional group and an acrylate functional group at an end.
13 . The adhesive composition of claim 12 , wherein:
the second repeating unit having the photoreactive functional group at the side chain is in a range of about 70 mol % to about 90 mol % of the second repeating unit; and
at least a portion of the second repeating unit excluding the second repeating unit having the photoreactive functional group forms the three-dimensional cross-linked structure.
14 . The adhesive composition of claim 13 , wherein the reactive functional group of the second repeating unit is a hydroxy group.
15 . The adhesive composition of claim 13 , wherein the three-dimensional cross-linked structure is derived from a thermosetting crosslinking agent reacting with the reactive functional group of the second repeating unit.
16 . The adhesive composition of claim 13 , wherein:
the photoreactive functional group is derived from a photocurable compound; and
the photocurable compound includes an isocyanate group that reacts with the reactive functional group of the second repeating unit, and a photoreactive functional group including a carbon-carbon double bond.
17 . The adhesive composition of claim 12 , wherein a weight average molecular weight of the third acrylate monomer that the fourth repeating unit is derived therefrom is in a range of about 5000 g/mol to about 10000 g/mol.
18 . The adhesive composition of claim 12 , wherein the first repeating unit, the second repeating unit and the third repeating unit are in a range of about 90% to about 99% of a total weight of the binder resin.
19 . The adhesive composition of claim 11 , wherein the siloxane-based functional group is any one of the functional groups represented by the following Formula 1a, Formula 1b and Formula 1c,
wherein in the above formula, each of R1 to R4 is a hydrogen atom or an alkyl group having 1 to 10 carbon atoms, and each of n1 to n3 is an integer between 1 to 200.
20 . A method of manufacturing a semiconductor device comprising:
attaching a wafer including a plurality of semiconductor chips on an adhesive layer including a binder resin and a photoinitiator;
sawing the wafer to separate the semiconductor chips from each other; and
peeling the semiconductor chips from the adhesive layer after irradiating the adhesive layer with ultraviolet ray,
wherein the binder resin includes a linear or a partially crosslinked copolymer having a plurality of repeating units derived from different acrylate monomers,
wherein the copolymer includes a repeating unit having a photoreactive functional group at a side chain and a repeating unit having a siloxane-based functional group at a side chain, and
wherein the repeating unit having a siloxane-based functional group is in a range of about 2% to about 5% of a total weight of the copolymer.