Evaporation source for vacuum evaporation apparatus
An evaporation source for use in a vacuum evaporation apparatus is provided with: an evaporation boat inclusive of a boat main body with a containing part for an evaporation material, and electrode mounting plate parts respectively extending outward from both ends of the boat main body; and material feeding means for feeding a wire-shaped evaporation material into the containing part from an upper side thereof. By charging electric current across both electrode mounting plate parts, the boat main body is heated to evaporate the evaporation material inside the containing part. A supporting means is disposed in contact, from underneath, with such a bottom plate part of the boat main body as defines the containing part. The supporting means has supporting plates disposed in a state in which upper ends of the supporting plates are in contact, from underneath, with the bottom plate part of the boat main body.
1 . An evaporation source for use in a vacuum evaporation apparatus which is to evaporate an evaporation material onto a substrate by evaporating the evaporation material in a vacuum chamber, the evaporation source comprising:
an evaporation boat 3 including a boat main body having a containing part for the evaporation material, and electrode mounting plate parts respectively extending outward at both ends of the boat main body;
material feeding means for feeding a wire-shaped evaporation material, from an upper side of the containing part, thereinto such that, by charging electric current across both electrode mounting plate parts, the boat main body is heated to evaporate the evaporation material inside the containing part;
wherein the evaporation source further comprises: a supporting means coming into contact, from below, with a bottom plate part of the boat main body that defines the containing part, the containing part being under an action of weight to be caused by the feeding of the evaporation material; and
wherein the supporting means has a supporting plate disposed in a state in which an upper end of the supporting plate is in contact with the bottom plate part of the boat main body, a free-end side of the supporting plate being an edge of the supporting plate and contacting only a portion of the bottom plate part, the supporting plate extending from the free-end side away from the bottom plate part.
2 . The evaporation source for use in a vacuum evaporation apparatus according to claim 1 , wherein the supporting plate is made of a high-melting point metal disposed on a base plate through insulators.
3 . The evaporation source for use in a vacuum evaporation apparatus according to claim 2 , wherein the supporting plate comprises two supporting plates each having a trough shape and being formed by bending a piece of metal plate, wherein the two supporting plates are placed in parallel with each other in a posture in which the free-end side of each supporting plate faces the containing-part side and the free-end side of each supporting plate comes into contact with the bottom plate part.
4 . The evaporation source for use in a vacuum evaporation apparatus according to claim 2 , wherein the supporting means further comprises a reflector plate which is disposed above the base plate and which has an area equivalent to or greater than the area of the bottom surface of the evaporation boat.
5 . The evaporation source for use in a vacuum evaporation apparatus according to claim 3 , wherein the supporting means further comprises a reflector plate which is disposed above the base plate and which has an area equivalent to or greater than the area of the bottom surface of the evaporation boat.