IP Library Granted Patent US 12668889
Granted Patent B2
US 12668889 · App. 17/434,221 · Granted Jun 30, 2026

Rare-earth ion doped thin film technologies

Inventors: Manish Singh (Chicago, IL); Tian Zhong (Chicago, IL); Supratik Guha (Chicago, IL)
Assignee: THE UNIVERSITY OF CHICAGO
C30B23/02C30B29/16C30B29/32C30B33/08H01F10/126H01F41/302
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Quick Facts
Patent No.
US 12668889
App. No.
17/434,221
Granted
Jun 30, 2026
Kind
B2
Abstract

The present disclosure includes a thin film assembly comprising a substrate and an epitaxial crystalline thin film disposed on the substrate, wherein the epitaxial crystalline thin film is a single crystal, wherein at least a portion of the epitaxial crystalline thin film is doped with rare-earth ions at a concentration of less than 100 parts per billion. The disclosure further includes a method of manufacturing a thin film assembly, the method comprising creating, on a substrate and with use of molecular beam epitaxy, an epitaxial crystalline thin film doped with the rare-earth ions at a concentration of less than 100 parts per billion.

Claims (19)

1 . A thin film assembly comprising:

a substrate; and

an epitaxial crystalline thin film disposed on the substrate, wherein the epitaxial crystalline thin film comprises a rare-earth oxide,

wherein the epitaxial crystalline thin film is a single crystal,

wherein at least a portion of the epitaxial crystalline thin film is doped with rare-earth ions;

wherein the epitaxial crystalline thin film comprises:

a first undoped buffer epitaxial crystalline thin film on the substrate;

a doped epitaxial crystalline thin film on the first undoped buffer epitaxial crystalline thin film, wherein the doped epitaxial crystalline thin film is doped with the rare-earth ions at a concentration of less than 100 parts per billion; and

a second undoped buffer epitaxial crystalline thin film on the doped epitaxial crystalline thin film;

wherein the first undoped buffer epitaxial crystalline thin film is at least 100 nanometers thick, and the second undoped buffer epitaxial crystalline thin film is at least 100 nanometers thick.

2 . The thin film assembly of claim 1 , wherein the epitaxial crystalline thin film has a thickness between 200 nanometers and 1,500 nanometers.

3 . The thin film assembly of claim 1 , wherein the epitaxial crystalline thin film has a thickness less than two microns.

4 . The thin film assembly of claim 1 , wherein the doped epitaxial crystalline thin film comprises a plurality of doped regions, wherein each of the plurality of doped regions is separated from each other of the plurality of doped regions by at least 100 nm.

5 . The thin film assembly of claim 1 , wherein the substrate is silicon,

wherein epitaxial crystalline thin film is yttrium oxide,

wherein the rare-earth ions are erbium.

6 . The thin film assembly of claim 1 , wherein the rare-earth ions are europium, praseodymium, neodymium, or ytterbium.

7 . The thin film assembly of claim 1 , wherein the epitaxial crystalline thin film is strontium titanate.

8 . The thin film assembly of claim 1 , wherein the thin film assembly is integrated into one of a quantum memory device, a quantum information processing device, a quantum electronic device, and a photonic device.